JPS6166685U - - Google Patents

Info

Publication number
JPS6166685U
JPS6166685U JP15148084U JP15148084U JPS6166685U JP S6166685 U JPS6166685 U JP S6166685U JP 15148084 U JP15148084 U JP 15148084U JP 15148084 U JP15148084 U JP 15148084U JP S6166685 U JPS6166685 U JP S6166685U
Authority
JP
Japan
Prior art keywords
negative pressure
suction
piston
chamber
check valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15148084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03533Y2 (US07321065-20080122-C00160.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984151480U priority Critical patent/JPH03533Y2/ja
Publication of JPS6166685U publication Critical patent/JPS6166685U/ja
Application granted granted Critical
Publication of JPH03533Y2 publication Critical patent/JPH03533Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1984151480U 1984-10-05 1984-10-05 Expired JPH03533Y2 (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984151480U JPH03533Y2 (US07321065-20080122-C00160.png) 1984-10-05 1984-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984151480U JPH03533Y2 (US07321065-20080122-C00160.png) 1984-10-05 1984-10-05

Publications (2)

Publication Number Publication Date
JPS6166685U true JPS6166685U (US07321065-20080122-C00160.png) 1986-05-07
JPH03533Y2 JPH03533Y2 (US07321065-20080122-C00160.png) 1991-01-10

Family

ID=30709591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984151480U Expired JPH03533Y2 (US07321065-20080122-C00160.png) 1984-10-05 1984-10-05

Country Status (1)

Country Link
JP (1) JPH03533Y2 (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006027848A1 (ja) * 2004-09-10 2008-05-08 株式会社中央技研工業 多段ピストン式真空ポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5173706U (US07321065-20080122-C00160.png) * 1974-12-09 1976-06-10
JPS55180092U (US07321065-20080122-C00160.png) * 1979-06-12 1980-12-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5173706U (US07321065-20080122-C00160.png) * 1974-12-09 1976-06-10
JPS55180092U (US07321065-20080122-C00160.png) * 1979-06-12 1980-12-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006027848A1 (ja) * 2004-09-10 2008-05-08 株式会社中央技研工業 多段ピストン式真空ポンプ

Also Published As

Publication number Publication date
JPH03533Y2 (US07321065-20080122-C00160.png) 1991-01-10

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