JPS6165455U - - Google Patents

Info

Publication number
JPS6165455U
JPS6165455U JP1984149861U JP14986184U JPS6165455U JP S6165455 U JPS6165455 U JP S6165455U JP 1984149861 U JP1984149861 U JP 1984149861U JP 14986184 U JP14986184 U JP 14986184U JP S6165455 U JPS6165455 U JP S6165455U
Authority
JP
Japan
Prior art keywords
photomask substrate
vertex
utility
rectangular shape
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149861U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149861U priority Critical patent/JPS6165455U/ja
Publication of JPS6165455U publication Critical patent/JPS6165455U/ja
Pending legal-status Critical Current

Links

JP1984149861U 1984-10-02 1984-10-02 Pending JPS6165455U (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149861U JPS6165455U (US06623731-20030923-C00052.png) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149861U JPS6165455U (US06623731-20030923-C00052.png) 1984-10-02 1984-10-02

Publications (1)

Publication Number Publication Date
JPS6165455U true JPS6165455U (US06623731-20030923-C00052.png) 1986-05-06

Family

ID=30708028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149861U Pending JPS6165455U (US06623731-20030923-C00052.png) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPS6165455U (US06623731-20030923-C00052.png)

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