JPS6164327U - - Google Patents

Info

Publication number

JPS6164327U

JPS6164327U JP14920584U JP14920584U JPS6164327U JP S6164327 U JPS6164327 U JP S6164327U JP 14920584 U JP14920584 U JP 14920584U JP 14920584 U JP14920584 U JP 14920584U JP S6164327 U JPS6164327 U JP S6164327U

Authority

JP

Japan

Prior art keywords

gutter

vapor deposition

recovery

recovery plate

heating mechanism

Prior art date

1984-10-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000011084 recovery Methods 0.000 claims description 6
• 238000007740 vapor deposition Methods 0.000 claims description 3
• 230000008020 evaporation Effects 0.000 claims description 2
• 238000001704 evaporation Methods 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims description 2
• 239000000126 substance Substances 0.000 claims description 2