JPS6164311U - - Google Patents

Info

Publication number

JPS6164311U

JPS6164311U JP14908784U JP14908784U JPS6164311U JP S6164311 U JPS6164311 U JP S6164311U JP 14908784 U JP14908784 U JP 14908784U JP 14908784 U JP14908784 U JP 14908784U JP S6164311 U JPS6164311 U JP S6164311U

Authority

JP

Japan

Prior art keywords

side chamber

flow path

pressure gauge

filter

interposed

Prior art date

1984-10-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000012790 confirmation Methods 0.000 claims description 4
• 210000002445 nipple Anatomy 0.000 description 3
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1