JPS6164067U - - Google Patents

Info

Publication number
JPS6164067U
JPS6164067U JP14866384U JP14866384U JPS6164067U JP S6164067 U JPS6164067 U JP S6164067U JP 14866384 U JP14866384 U JP 14866384U JP 14866384 U JP14866384 U JP 14866384U JP S6164067 U JPS6164067 U JP S6164067U
Authority
JP
Japan
Prior art keywords
flow path
connection port
container
cleaning liquid
cooling water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14866384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14866384U priority Critical patent/JPS6164067U/ja
Publication of JPS6164067U publication Critical patent/JPS6164067U/ja
Pending legal-status Critical Current

Links

JP14866384U 1984-10-01 1984-10-01 Pending JPS6164067U (US20100268047A1-20101021-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14866384U JPS6164067U (US20100268047A1-20101021-C00004.png) 1984-10-01 1984-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14866384U JPS6164067U (US20100268047A1-20101021-C00004.png) 1984-10-01 1984-10-01

Publications (1)

Publication Number Publication Date
JPS6164067U true JPS6164067U (US20100268047A1-20101021-C00004.png) 1986-05-01

Family

ID=30706867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14866384U Pending JPS6164067U (US20100268047A1-20101021-C00004.png) 1984-10-01 1984-10-01

Country Status (1)

Country Link
JP (1) JPS6164067U (US20100268047A1-20101021-C00004.png)

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