JPS6158983B2 - - Google Patents
Info
- Publication number
- JPS6158983B2 JPS6158983B2 JP52091699A JP9169977A JPS6158983B2 JP S6158983 B2 JPS6158983 B2 JP S6158983B2 JP 52091699 A JP52091699 A JP 52091699A JP 9169977 A JP9169977 A JP 9169977A JP S6158983 B2 JPS6158983 B2 JP S6158983B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- bit line
- word line
- line
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000015654 memory Effects 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 9
- 238000009825 accumulation Methods 0.000 claims description 4
- 238000005036 potential barrier Methods 0.000 claims description 4
- 210000004027 cell Anatomy 0.000 description 15
- 239000000758 substrate Substances 0.000 description 12
- 239000000969 carrier Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 210000000352 storage cell Anatomy 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052596 spinel Inorganic materials 0.000 description 3
- 239000011029 spinel Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9169977A JPS5425681A (en) | 1977-07-29 | 1977-07-29 | Semiconductor memory |
| US05/920,542 US4284997A (en) | 1977-07-07 | 1978-06-29 | Static induction transistor and its applied devices |
| NL7807236A NL191914C (nl) | 1977-07-07 | 1978-07-04 | Halfgeleiderinrichting. |
| GB7828927A GB2000908B (en) | 1977-07-07 | 1978-07-05 | Static induction transistor and its applied devices |
| FR7820381A FR2397070A1 (fr) | 1977-07-07 | 1978-07-07 | Transistor a induction, statique et montage comportant de tels transistors |
| DE2858191A DE2858191C2 (enrdf_load_stackoverflow) | 1977-07-07 | 1978-07-07 | |
| DE2829966A DE2829966C2 (de) | 1977-07-07 | 1978-07-07 | Halbleiterspeichervorrichtung |
| DE2858190A DE2858190C2 (enrdf_load_stackoverflow) | 1977-07-07 | 1978-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9169977A JPS5425681A (en) | 1977-07-29 | 1977-07-29 | Semiconductor memory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5425681A JPS5425681A (en) | 1979-02-26 |
| JPS6158983B2 true JPS6158983B2 (enrdf_load_stackoverflow) | 1986-12-13 |
Family
ID=14033755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9169977A Granted JPS5425681A (en) | 1977-07-07 | 1977-07-29 | Semiconductor memory |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5425681A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR940002835B1 (ko) * | 1991-04-17 | 1994-04-04 | 재단법인 한국전자통신연구소 | 접합전계형 다이내믹 램을 제조하는 방법 및 그 다이내믹 램의 구조 |
-
1977
- 1977-07-29 JP JP9169977A patent/JPS5425681A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5425681A (en) | 1979-02-26 |
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