JPS6157865U - - Google Patents

Info

Publication number

JPS6157865U

JPS6157865U JP14230584U JP14230584U JPS6157865U JP S6157865 U JPS6157865 U JP S6157865U JP 14230584 U JP14230584 U JP 14230584U JP 14230584 U JP14230584 U JP 14230584U JP S6157865 U JPS6157865 U JP S6157865U

Authority

JP

Japan

Prior art keywords

cantilever beam

diffused resistor

insulating film

semiconductor

deviation

Prior art date

1984-09-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 2
• 230000001133 acceleration Effects 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1