JPS6157543U - - Google Patents

Info

Publication number

JPS6157543U

JPS6157543U JP14126884U JP14126884U JPS6157543U JP S6157543 U JPS6157543 U JP S6157543U JP 14126884 U JP14126884 U JP 14126884U JP 14126884 U JP14126884 U JP 14126884U JP S6157543 U JPS6157543 U JP S6157543U

Authority

JP

Japan

Prior art keywords

pressure sensor

semiconductor pressure

diaphragm

utility

scope

Prior art date

1984-09-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 2
• 230000035945 sensitivity Effects 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1