JPS6156543U - - Google Patents

Info

Publication number
JPS6156543U
JPS6156543U JP14050584U JP14050584U JPS6156543U JP S6156543 U JPS6156543 U JP S6156543U JP 14050584 U JP14050584 U JP 14050584U JP 14050584 U JP14050584 U JP 14050584U JP S6156543 U JPS6156543 U JP S6156543U
Authority
JP
Japan
Prior art keywords
support portion
thin
diaphragm
pressure sensor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14050584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14050584U priority Critical patent/JPS6156543U/ja
Publication of JPS6156543U publication Critical patent/JPS6156543U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14050584U 1984-09-17 1984-09-17 Pending JPS6156543U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14050584U JPS6156543U (US06826419-20041130-M00005.png) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14050584U JPS6156543U (US06826419-20041130-M00005.png) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6156543U true JPS6156543U (US06826419-20041130-M00005.png) 1986-04-16

Family

ID=30698858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14050584U Pending JPS6156543U (US06826419-20041130-M00005.png) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6156543U (US06826419-20041130-M00005.png)

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