JPS6156009B2 - - Google Patents

Info

Publication number
JPS6156009B2
JPS6156009B2 JP56161202A JP16120281A JPS6156009B2 JP S6156009 B2 JPS6156009 B2 JP S6156009B2 JP 56161202 A JP56161202 A JP 56161202A JP 16120281 A JP16120281 A JP 16120281A JP S6156009 B2 JPS6156009 B2 JP S6156009B2
Authority
JP
Japan
Prior art keywords
gas
temperature
room
low
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56161202A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5861816A (ja
Inventor
Masatoshi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Oxygen Industries Ltd
Original Assignee
Osaka Oxygen Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Oxygen Industries Ltd filed Critical Osaka Oxygen Industries Ltd
Priority to JP56161202A priority Critical patent/JPS5861816A/ja
Publication of JPS5861816A publication Critical patent/JPS5861816A/ja
Publication of JPS6156009B2 publication Critical patent/JPS6156009B2/ja
Granted legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/40Capture or disposal of greenhouse gases of CO2

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP56161202A 1981-10-09 1981-10-09 高純度ガス精製装置の再生方法 Granted JPS5861816A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56161202A JPS5861816A (ja) 1981-10-09 1981-10-09 高純度ガス精製装置の再生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161202A JPS5861816A (ja) 1981-10-09 1981-10-09 高純度ガス精製装置の再生方法

Publications (2)

Publication Number Publication Date
JPS5861816A JPS5861816A (ja) 1983-04-13
JPS6156009B2 true JPS6156009B2 (US20020095090A1-20020718-M00002.png) 1986-12-01

Family

ID=15730530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161202A Granted JPS5861816A (ja) 1981-10-09 1981-10-09 高純度ガス精製装置の再生方法

Country Status (1)

Country Link
JP (1) JPS5861816A (US20020095090A1-20020718-M00002.png)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182822A (ja) * 1984-09-27 1986-04-26 Toshiba Corp ガス精製装置
JPH0356624U (US20020095090A1-20020718-M00002.png) * 1989-09-29 1991-05-30
US20180238041A1 (en) 2017-02-21 2018-08-23 Styrc Jacek Modular furniture system
USD887025S1 (en) 2017-11-17 2020-06-09 2724889 Ontario Inc. Connector for a modular structure
USD938772S1 (en) 2020-02-04 2021-12-21 2724889 Ontario Inc. Connector
USD938770S1 (en) 2020-02-04 2021-12-21 2724889 Ontario Inc. Connector
USD938771S1 (en) 2020-02-04 2021-12-21 2724889 Ontario Inc. Connector
USD939106S1 (en) 2020-08-12 2021-12-21 2724889 Ontario Inc. Connector for a modular structure
USD936247S1 (en) 2020-08-12 2021-11-16 2724889 Ontario Inc. Connector for a modular structure
USD938068S1 (en) 2020-08-12 2021-12-07 2724889 Ontario Inc. Connector for a modular structure
USD936246S1 (en) 2020-08-12 2021-11-16 2724889 Ontario Inc. Connector for a modular structure
USD939731S1 (en) 2020-08-12 2021-12-28 2724889 Ontario Inc. Connector for a modular structure

Also Published As

Publication number Publication date
JPS5861816A (ja) 1983-04-13

Similar Documents

Publication Publication Date Title
JP3277340B2 (ja) 半導体製造工場向け各種ガスの製造方法及び装置
US20210170322A1 (en) Psa separation-purification system and process integrated with water gas shift reaction process
JP5392745B2 (ja) キセノンの濃縮方法、キセノン濃縮装置、及び空気液化分離装置
US3216178A (en) Process for regenerating an adsorbent bed
JPS6156009B2 (US20020095090A1-20020718-M00002.png)
CN101530717A (zh) 一种低温吸附连续生产超纯气体的方法
JP3737900B2 (ja) 単結晶製造炉からの排ガスアルゴンの精製方法
JPH0459926B2 (US20020095090A1-20020718-M00002.png)
CN102311103B (zh) 氦气的纯化方法及纯化装置
KR20090005702A (ko) 폐헬륨가스 농축정제장치
CN102311102B (zh) 氦气的纯化方法及纯化装置
KR101720799B1 (ko) 아르곤 가스의 정제 방법 및 정제 장치
KR101909291B1 (ko) 아르곤 가스의 정제 방법 및 정제 장치
CN112439398B (zh) 一种气体吸附柱再生的方法、装置及尾气回收系统
JPS557565A (en) Helium or hydrogen gas purification apparatus
JP3172886B2 (ja) ヘリウムガス精製装置及びその運転方法
JPH01126203A (ja) 高純度水素ガスの製造方法
JP2020116545A (ja) 低温精製装置及び低温精製装置の運転方法
JPS6329724Y2 (US20020095090A1-20020718-M00002.png)
JPS6129768B2 (US20020095090A1-20020718-M00002.png)
JP4313882B2 (ja) クローズドtsa法によるメタノール分解ガス中の有機不純物の除去方法
JP3043282B2 (ja) ガス精製方法およびそれに用いる装置
JPS6244973Y2 (US20020095090A1-20020718-M00002.png)
JP2006111506A (ja) 不純物含有アルゴンガスの精製方法および精製装置
JPH0531331A (ja) 水素同位体の分離方法