JPS6154433A - Instrument for measuring optically surface physical properties - Google Patents

Abstract

PURPOSE:To measure light distribution characteristic of the surface of be detected by separating fiber for irradiation from fiber for detection. CONSTITUTION:Radiant flux 13 of the fiber 55 for irradiation is provided to cross at right angles with the surface 29 to be detected and joined with the fiber 56 for detection by using a fastener 57 to make an optional angle theta with incident light. The light distribution characteristic of reflected light can be obtained by changing this angle theta. Since the reflected light from the surface 29 to be detected can thus be detected with an optional angle, the light distribution characteristic of the sample reflected light can be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an optical surface property measuring device for measuring the reflectance of a substance.

[Prior Art] The basic form of the reflectance measuring device according to the present invention is described in reference document r Jourr+al of Chemical P.
hysics J7918, 15-0ctober
-1983, P, 3701-3709. The basic concept of this measuring device will be explained below with reference to FIG.

The radiant flux 3-1, 3-2 from the radiant source 1 is converted into a parallel radiant flux 3-3 by the elliptical reflector 2, and is converted into a parallel radiant flux 3-3 by the monochromator.
4. The output radiation flux from the monochromator 4 passes through the input section 5 of the Y-shaped fiber 40 to the fiber 6.
．． 7 respectively. The radiation flux is transmitted alternately by the couplings 8 between the fibers 6 and 9 and between the fibers 7 and 10, the radiation flux from the fiber 9 is transmitted from its end face 11 to the test surface 28, and the radiation flux from the fiber 10 is transmitted from its end face 11 to the test surface 28. End face 12
The reference surface 30 is alternately irradiated from each other. The reflected radiation flux 14 from the test surface 28 is transmitted from the end face 11 to the fiber 15,
The reflected radiation bundle 14 from the reference surface 30 is transmitted from the end face 12 to the fiber 18 and is incident on the monochromator 17.

The emitted radiant flux 34 from the monochromator 17 is inputted to the photomultiplier 19 via a light-shielding tube 35, etc.
After that, the pig amblifier 20, bypass filter 21, amblifier 22, phase synchronization circuit 23,
Microcomputer 2 via A-D converter 25
7 as a digital signal.

The monochromators 4 and 17 are synchronously wavelength-scanned via step motors 1B-1 and 18-2 using a signal 33 previously stored in the microcomputer 27. In addition, the scanning signal 24 of the chopper 8
is input to the microcomputer 27 via a phase synchronized circuit.

Next, the signals input to the microcomputer 27 will be explained.

In FIG. 3, if the signals reflected from the test surface 28 and the reference surface 3o and entering the microcomputer 27 via the electrical amplification system are rl+r2, then r1+r2 is expressed as follows.

r, = 工　xt,XR.

rl = IoXt2 XR2 However, each symbol represents the following items.

tl = Test surface detection side optical system transmittance t2: Reference surface detection side optical system transmittance RI: Test surface reflectance R2 = Reference surface reflectance The reflectance R□ of the test surface 29 is obtained by multiplying the above r1 by rl. Then, it is obtained by dividing the value by As, a term for correcting the difference between tl and t2, and multiplying it by the theoretical reflectance of the same material as the reference surface. This can be expressed as follows.

・・・・・・・・・(1) Note that in equation (1), R2'iRr is used.

Regarding As, when the same substance as the reference surface is placed on the test surface, the signal value (Eng.
It is divided by the signal (Xt2 The widened signals rt and r2 are very low.

The signals are transmitted alternately at intervals of the period T in synchronization with the period T of the signal P8. FIG. 2 shows the relationship between rI+r2 and period T. Therefore, the average value of the sum of several rl's can be taken as the value of rl, or the average value of the sum of several rl's can be taken as the rl value.

In this way, the relationship between the reflectance R from the test surface obtained by using r1+r2 and equation (L) with respect to the wavelength variable by the monochromator, and the relative difference in the reflectance from the two types of test surfaces The relationship with respect to the variable wavelength determined by the monochromator is displayed on the plotter 28 or the cathode ray tube 3B, or recorded on the disk 37.

Next, the shape of the fiber end face according to the present invention will be described. :Figure 54 shows fibers 9 and 15 or 10 and 1.
6 shows the shape of each end face 11, 12 when the two are integrated.

In the figure, another fiber bundle 48 is wound around the outside of the fiber bundle 47.
7.48 are each fiber 9. lO or fiber 10
, 9. Also, what is shown by the opening in the figure is a semicircular fiber bundle 50 and a fiber bundle 50.
1 are joined, and 50.51 are each fiber 9
, 10 or fiber 1O99. Furthermore, what is shown by C in the figure is one in which the irradiation fiber 53 and the reflected radiant flux detection fiber 54 are randomly mixed in the same ratio. A collection of 53 types of fibers corresponds to fiber 9, and a collection of 54 types of fibers corresponds to fiber 10.

[Problems to be Solved by the Invention] In the above-mentioned measuring device, since the irradiation fiber and the detection fiber were integrated, it was not possible to measure the light distribution characteristics of the test surface. , it was necessary to prepare other equipment separately. As a result, measurement tasks such as sample setting are repeated, which is very inconvenient.

The present invention has been made in view of these conventional problems, and aims to provide an apparatus that can measure the light distribution characteristics of a surface to be inspected by separating the irradiation fiber and the detection fiber.

[Means for Solving the Problems] FIG. 1 shows a basic concept that has not yet been invented. The fiber end shape shown in FIG. 4 is the irradiation fiber 55.
It was an integrated device with a detection fiber 56, but 1
The present invention includes an irradiation fiber 55 and a detection fiber 5.
6 are installed independently without being integrated, and the angle of attachment of the detection fiber 56 can be set at any position.

[Function] By detecting the reflected light from the test surface at an arbitrary angle, the light distribution characteristics of the sample reflected light can be measured by the above-mentioned technical means.

[Example] In this example, in the apparatus diagram shown in FIG. 3, the irradiation part for the test surface (the broken line part in FIG. 3) was changed based on each example described below. Therefore, the configuration of each device other than that and the flow of signals are as explained in the above-mentioned [Prior Art].

FIG. 5 shows a first embodiment of the present invention, in which the irradiation fiber 55 is installed so that the radiation flux 14 is perpendicular to the test surface 29, and the detection fiber 56 is attached to the stopper. 5
7 to join the incident light at an arbitrary angle θ. By changing this angle θ, the light distribution characteristics of the reflected light can be determined.

FIG. 6 shows a second embodiment, in which the stopper 57
As shown in the figure, 57-a, 57-b, 57-c
(7) With the three-part configuration, the central axis of the detection fiber can always be directed toward the irradiation center 60. Moreover, as shown by the broken line in FIG. 6, a plurality of stoppers 57-b, 5
By combining 7-c, it is possible to simultaneously measure multiple light distribution angles.

Figure 7 A1 shows the third embodiment, in which the stopper 57
-d, attach the semicircular guide rail 57-e,
Furthermore, the light distribution characteristics are measured by sliding the detection fiber support 57-f on the half-moon-shaped guide rail. In this case, it is desirable to set δ shown in the side view of the mouth as small as possible.

Fig. 8B shows the fourth embodiment, in which the irradiation fiber is divided into two parts like 55-a and 55-b, and the detection fiber is placed in the center of the two parts. By sliding on the circular guide rail 57-h, the δ
can be set to 0.

FIG. 9 shows a fifth embodiment, in which the detection fiber is separated into a plurality of parts according to the light distribution angle.

The detection fiber 5E11-n is connected to the irradiation fiber 5.
The light distribution angle of the reflected light from the sample is θi (i-1-n, n;
The light distribution characteristics are obtained by arranging a group of detection fibers so that the number of ring zones), bundling the detection-side fibers into groups, and detecting each group. In addition, 0=0
In other words, in the case of specular reflection perpendicular to the sample surface, the detection fiber shown in Figure 4 does not need to be placed around the irradiation fiber as shown in Figure 9, 56-1. They may also be randomly arranged.

In addition, as the surface to be tested in the measuring device of the present invention, L-
8 (Langmuir-Blodgett) membranes are also included.

[Effects of the Invention] As is clear from the above description, in the present invention, since the irradiation fiber and the detection fiber are installed independently, the light distribution characteristics of the sample reflected light can also be measured.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram showing the basic concept of the present invention. Figure 2 shows
A graph showing the relationship between the signal rl+r2 and the period T. Third
FIG. 1 is a configuration diagram showing a basic form of a reflectance measuring device according to the present invention. FIGS. 4A, 4B, and 4C are cross-sectional views of the configuration in which the irradiation and detection fibers are integrated, and FIG. 5 is a configuration diagram showing the first embodiment of the present invention. FIG. 6 is a block diagram showing a second embodiment of the present invention, and FIG. 7A is a block diagram showing a third embodiment of the present invention. Figure 7 is a side view of A. Figure 8 A is
FIG. 8 is a side view showing the fourth embodiment of the present invention; FIG. 9 is a block diagram showing the fifth embodiment of the present invention. l; Radiation source 2: elliptical reflector 3-1.3-2; radiant flux 3-3; parallel radiant flux 4.17; monochromator 5, Y-shaped fiber manual section 6.7, 9, 10, 15, 18; Nearfiber-8, 40
;Chopper 11.12;Fiber end face. 13: Emitted radiant flux 14; Reflected radiant flux 18-1, 18-2; Step motor 19; Photo multiplier, 20; Log amblifier 21; Bypass filter 22; Amblifier 23; Phase synchronization circuit 24; Scanning signal 25; A-D converter 27; Microcomputer 28; Plotter 23; Test surface 30; Reference surface 31; Cooler 32; Stabilized power supply 33; Step motor 18-1, 18-2 scanning signal 34
emitted radiation flux 35 from the monochromator 17; light shield tube 36; cathode ray tube 37; disk 38; second radiation source 38: light absorber 40: Y-shaped fiber 47, 48.50.51. fiber bundle 53,
54, fiber bundle 55; irradiation fiber 56; detection fiber 57, 57-a, 57-b, 57-c,
57-d; stopper 57-e; semicircular guide rails 57-f, 57-h, 57-i; detection fiber support 57-g, irradiation fiber support BO; irradiation center rl; test surface 28 Electrically amplified signal r2 of the radiant flux reflected from the reference surface 30: Electrically amplified signal T of the radiant flux reflected from the reference surface 30; Scanning period of the chopper 8

Claims (1)

[Claims] 1) Light from a radiation source is irradiated onto the test surface via a first monochromator, and the reflected radiation flux is made to enter a second monochromator to electrically detect information. An optical surface property measuring device, characterized in that a detection fiber that guides the reflected radiant flux to a second monochromator can be set at any angle with respect to the normal to the surface to be measured. 2) The optical surface property measuring device according to claim 1, characterized in that it has a plurality of detection fibers respectively corresponding to different light distribution angles. 3) The light from the first monochromator is guided to the test surface by the irradiation fiber, and the detection fiber group is grouped into annular shapes around the illumination fiber according to the light distribution angle. An optical surface property measuring device according to claim 2, which is characterized by: 4) The light from the first monochromator is guided to the test surface by an irradiation fiber, and the irradiation fiber and the detection fiber are joined at an arbitrary angle by a stopper. The optical surface property measuring device described in 2. 5) The light from the first monochromator is guided to the test surface by an irradiation fiber, and a half-moon-shaped guide rail is provided at the end of this irradiation fiber, so that the detection fiber can be set at any light distribution angle. An optical surface property measuring device according to claim 1, characterized in that: 6) The optical surface according to claim 1, characterized in that a pair of irradiation fibers that guide the light from the first monochromator to the test surface are provided on both sides of the detection fiber. Physical property measuring device.