JPS6153632B2 - - Google Patents
Info
- Publication number
- JPS6153632B2 JPS6153632B2 JP17319181A JP17319181A JPS6153632B2 JP S6153632 B2 JPS6153632 B2 JP S6153632B2 JP 17319181 A JP17319181 A JP 17319181A JP 17319181 A JP17319181 A JP 17319181A JP S6153632 B2 JPS6153632 B2 JP S6153632B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- heating
- conveyor belt
- heat
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 27
- 238000001035 drying Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 230000008570 general process Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000002904 solvent Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Drying Of Solid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17319181A JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17319181A JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5875684A JPS5875684A (ja) | 1983-05-07 |
| JPS6153632B2 true JPS6153632B2 (de) | 1986-11-18 |
Family
ID=15955776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17319181A Granted JPS5875684A (ja) | 1981-10-29 | 1981-10-29 | 均一加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5875684A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0328672D0 (en) * | 2003-12-10 | 2004-01-14 | Genome Res Ltd | Modular units |
| WO2012008218A1 (ja) * | 2010-07-12 | 2012-01-19 | シャープ株式会社 | 塗布膜製造用加熱乾燥装置およびこれを備えた塗布膜製造装置ならびに塗布膜製造方法 |
| CN108807589A (zh) * | 2017-05-05 | 2018-11-13 | 先进科技新加坡有限公司 | 具有双进气口的太阳能电池烘干机 |
-
1981
- 1981-10-29 JP JP17319181A patent/JPS5875684A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5875684A (ja) | 1983-05-07 |
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