JPS6152111U - - Google Patents

Info

Publication number
JPS6152111U
JPS6152111U JP13603784U JP13603784U JPS6152111U JP S6152111 U JPS6152111 U JP S6152111U JP 13603784 U JP13603784 U JP 13603784U JP 13603784 U JP13603784 U JP 13603784U JP S6152111 U JPS6152111 U JP S6152111U
Authority
JP
Japan
Prior art keywords
heating element
planar heating
mounting base
attached
top plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13603784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414879Y2 (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984136037U priority Critical patent/JPH0414879Y2/ja
Publication of JPS6152111U publication Critical patent/JPS6152111U/ja
Application granted granted Critical
Publication of JPH0414879Y2 publication Critical patent/JPH0414879Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electric Stoves And Ranges (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
JP1984136037U 1984-09-07 1984-09-07 Expired JPH0414879Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984136037U JPH0414879Y2 (US20020051482A1-20020502-M00012.png) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984136037U JPH0414879Y2 (US20020051482A1-20020502-M00012.png) 1984-09-07 1984-09-07

Publications (2)

Publication Number Publication Date
JPS6152111U true JPS6152111U (US20020051482A1-20020502-M00012.png) 1986-04-08
JPH0414879Y2 JPH0414879Y2 (US20020051482A1-20020502-M00012.png) 1992-04-03

Family

ID=30694514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984136037U Expired JPH0414879Y2 (US20020051482A1-20020502-M00012.png) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPH0414879Y2 (US20020051482A1-20020502-M00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001084623A1 (fr) * 2000-05-01 2001-11-08 Ibiden Co., Ltd. Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs
JP2002025756A (ja) * 2000-07-04 2002-01-25 Ibiden Co Ltd 半導体製造・検査装置用ホットプレート

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52132438A (en) * 1976-04-23 1977-11-07 Toshiba Corp Exothermic device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52132438A (en) * 1976-04-23 1977-11-07 Toshiba Corp Exothermic device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001084623A1 (fr) * 2000-05-01 2001-11-08 Ibiden Co., Ltd. Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs
JP2002025756A (ja) * 2000-07-04 2002-01-25 Ibiden Co Ltd 半導体製造・検査装置用ホットプレート

Also Published As

Publication number Publication date
JPH0414879Y2 (US20020051482A1-20020502-M00012.png) 1992-04-03

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