JPS6150917U - - Google Patents

Info

Publication number
JPS6150917U
JPS6150917U JP13686484U JP13686484U JPS6150917U JP S6150917 U JPS6150917 U JP S6150917U JP 13686484 U JP13686484 U JP 13686484U JP 13686484 U JP13686484 U JP 13686484U JP S6150917 U JPS6150917 U JP S6150917U
Authority
JP
Japan
Prior art keywords
optical integrator
exit
entrance
parts
lens element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13686484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13686484U priority Critical patent/JPS6150917U/ja
Publication of JPS6150917U publication Critical patent/JPS6150917U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
JP13686484U 1984-09-10 1984-09-10 Pending JPS6150917U (US20100170793A1-20100708-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13686484U JPS6150917U (US20100170793A1-20100708-C00006.png) 1984-09-10 1984-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13686484U JPS6150917U (US20100170793A1-20100708-C00006.png) 1984-09-10 1984-09-10

Publications (1)

Publication Number Publication Date
JPS6150917U true JPS6150917U (US20100170793A1-20100708-C00006.png) 1986-04-05

Family

ID=30695296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13686484U Pending JPS6150917U (US20100170793A1-20100708-C00006.png) 1984-09-10 1984-09-10

Country Status (1)

Country Link
JP (1) JPS6150917U (US20100170793A1-20100708-C00006.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681813A (en) * 1979-12-08 1981-07-04 Nippon Telegr & Teleph Corp <Ntt> Mask lighting optical system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681813A (en) * 1979-12-08 1981-07-04 Nippon Telegr & Teleph Corp <Ntt> Mask lighting optical system

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