JPS6150759U - - Google Patents

Info

Publication number
JPS6150759U
JPS6150759U JP13414684U JP13414684U JPS6150759U JP S6150759 U JPS6150759 U JP S6150759U JP 13414684 U JP13414684 U JP 13414684U JP 13414684 U JP13414684 U JP 13414684U JP S6150759 U JPS6150759 U JP S6150759U
Authority
JP
Japan
Prior art keywords
exhaust port
opening
reaction tube
buffer portion
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13414684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13414684U priority Critical patent/JPS6150759U/ja
Publication of JPS6150759U publication Critical patent/JPS6150759U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13414684U 1984-09-04 1984-09-04 Pending JPS6150759U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13414684U JPS6150759U (US07714131-20100511-C00038.png) 1984-09-04 1984-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13414684U JPS6150759U (US07714131-20100511-C00038.png) 1984-09-04 1984-09-04

Publications (1)

Publication Number Publication Date
JPS6150759U true JPS6150759U (US07714131-20100511-C00038.png) 1986-04-05

Family

ID=30692666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13414684U Pending JPS6150759U (US07714131-20100511-C00038.png) 1984-09-04 1984-09-04

Country Status (1)

Country Link
JP (1) JPS6150759U (US07714131-20100511-C00038.png)

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