JPS6149713U - - Google Patents

Info

Publication number
JPS6149713U
JPS6149713U JP13477684U JP13477684U JPS6149713U JP S6149713 U JPS6149713 U JP S6149713U JP 13477684 U JP13477684 U JP 13477684U JP 13477684 U JP13477684 U JP 13477684U JP S6149713 U JPS6149713 U JP S6149713U
Authority
JP
Japan
Prior art keywords
transfer device
clean air
load
cover
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13477684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237763Y2 (US06826419-20041130-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13477684U priority Critical patent/JPH0237763Y2/ja
Publication of JPS6149713U publication Critical patent/JPS6149713U/ja
Application granted granted Critical
Publication of JPH0237763Y2 publication Critical patent/JPH0237763Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP13477684U 1984-09-04 1984-09-04 Expired JPH0237763Y2 (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13477684U JPH0237763Y2 (US06826419-20041130-M00005.png) 1984-09-04 1984-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13477684U JPH0237763Y2 (US06826419-20041130-M00005.png) 1984-09-04 1984-09-04

Publications (2)

Publication Number Publication Date
JPS6149713U true JPS6149713U (US06826419-20041130-M00005.png) 1986-04-03
JPH0237763Y2 JPH0237763Y2 (US06826419-20041130-M00005.png) 1990-10-12

Family

ID=30693281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13477684U Expired JPH0237763Y2 (US06826419-20041130-M00005.png) 1984-09-04 1984-09-04

Country Status (1)

Country Link
JP (1) JPH0237763Y2 (US06826419-20041130-M00005.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (US06826419-20041130-M00005.png) * 1986-06-10 1987-12-21
JPS6348706U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02
JP2011173478A (ja) * 2010-02-24 2011-09-08 Muratec Automation Co Ltd 搬送車システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (US06826419-20041130-M00005.png) * 1986-06-10 1987-12-21
JPS6348706U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02
JP2011173478A (ja) * 2010-02-24 2011-09-08 Muratec Automation Co Ltd 搬送車システム

Also Published As

Publication number Publication date
JPH0237763Y2 (US06826419-20041130-M00005.png) 1990-10-12

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