JPS6149363A - Image focusing system of electron microscope - Google Patents

Image focusing system of electron microscope

Info

Publication number
JPS6149363A
JPS6149363A JP17002784A JP17002784A JPS6149363A JP S6149363 A JPS6149363 A JP S6149363A JP 17002784 A JP17002784 A JP 17002784A JP 17002784 A JP17002784 A JP 17002784A JP S6149363 A JPS6149363 A JP S6149363A
Authority
JP
Japan
Prior art keywords
lens
image
magnifications
real image
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17002784A
Other languages
Japanese (ja)
Inventor
Akira Yonezawa
Original Assignee
Internatl Precision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Internatl Precision Inc filed Critical Internatl Precision Inc
Priority to JP17002784A priority Critical patent/JPS6149363A/en
Publication of JPS6149363A publication Critical patent/JPS6149363A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Abstract

PURPOSE:To meke the observation eliminating the turning or the reversal of an image in the magnifications from several tens magnifications to tens of thousands magnifications possible by providing 6 stage lens at the rear of a specimen, and setting their polarity in accordance with given rule, and always making the image of a specimen image in the stages. CONSTITUTION:In the magnifications lower than thousand magnifications by means of the setting of lens polarity, the first stage real image 9 is formed by an objective lens 3, the first and the second intermidiate lens 4, 5, and the second stage real image 10 is formed by the thired and the fourth intermediate lens 6, 7, and the third stage real image 11 is formed on a recording screen by a projecting lens 8. Further, in low or middle magnificatins and middle are high magnifications more than thousand magnifications, the first stage real image 9 is formed by the lens 3, 4, and the second stage real image 10 is formed by the lens 5, 6, 7, and the third stage real image 11 is formed by the lens 8. Thus, the image system of an electron microscope is constituted in such a manner as mentioned above. Accordingly, it is possible to restrain the mode between the low magnification and the middle and the high magnification and the reversal or the turning of the image for the change of the magnification, and to reduce the aberration from an axis.
JP17002784A 1984-08-16 1984-08-16 Image focusing system of electron microscope Pending JPS6149363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17002784A JPS6149363A (en) 1984-08-16 1984-08-16 Image focusing system of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17002784A JPS6149363A (en) 1984-08-16 1984-08-16 Image focusing system of electron microscope

Publications (1)

Publication Number Publication Date
JPS6149363A true JPS6149363A (en) 1986-03-11

Family

ID=15897241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17002784A Pending JPS6149363A (en) 1984-08-16 1984-08-16 Image focusing system of electron microscope

Country Status (1)

Country Link
JP (1) JPS6149363A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1585165A2 (en) 2004-04-08 2005-10-12 Jeol Ltd. Electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163671A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron microscope that have few rotation of image
JPS585956A (en) * 1981-07-01 1983-01-13 Hitachi Ltd Electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163671A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron microscope that have few rotation of image
JPS585956A (en) * 1981-07-01 1983-01-13 Hitachi Ltd Electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1585165A2 (en) 2004-04-08 2005-10-12 Jeol Ltd. Electron microscope
EP1585165A3 (en) * 2004-04-08 2008-03-12 Jeol Ltd. Electron microscope
US7977630B2 (en) 2004-04-08 2011-07-12 Jeol Ltd. Electron microscope

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