JPS6149280U - - Google Patents

Info

Publication number
JPS6149280U
JPS6149280U JP13281884U JP13281884U JPS6149280U JP S6149280 U JPS6149280 U JP S6149280U JP 13281884 U JP13281884 U JP 13281884U JP 13281884 U JP13281884 U JP 13281884U JP S6149280 U JPS6149280 U JP S6149280U
Authority
JP
Japan
Prior art keywords
cooling
water
tank
cooled
reserve tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13281884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248784Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13281884U priority Critical patent/JPH0248784Y2/ja
Publication of JPS6149280U publication Critical patent/JPS6149280U/ja
Application granted granted Critical
Publication of JPH0248784Y2 publication Critical patent/JPH0248784Y2/ja
Expired legal-status Critical Current

Links

JP13281884U 1984-08-31 1984-08-31 Expired JPH0248784Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13281884U JPH0248784Y2 (US20090163788A1-20090625-C00002.png) 1984-08-31 1984-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13281884U JPH0248784Y2 (US20090163788A1-20090625-C00002.png) 1984-08-31 1984-08-31

Publications (2)

Publication Number Publication Date
JPS6149280U true JPS6149280U (US20090163788A1-20090625-C00002.png) 1986-04-02
JPH0248784Y2 JPH0248784Y2 (US20090163788A1-20090625-C00002.png) 1990-12-20

Family

ID=30691373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13281884U Expired JPH0248784Y2 (US20090163788A1-20090625-C00002.png) 1984-08-31 1984-08-31

Country Status (1)

Country Link
JP (1) JPH0248784Y2 (US20090163788A1-20090625-C00002.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015001372A (ja) * 2013-06-17 2015-01-05 ファイン セミテック コーポレーション 半導体プロセス用冷却装置

Also Published As

Publication number Publication date
JPH0248784Y2 (US20090163788A1-20090625-C00002.png) 1990-12-20

Similar Documents

Publication Publication Date Title
JPS6149280U (US20090163788A1-20090625-C00002.png)
JPS6418115U (US20090163788A1-20090625-C00002.png)
JPH0361275U (US20090163788A1-20090625-C00002.png)
JPS62138988U (US20090163788A1-20090625-C00002.png)
JPS62172987U (US20090163788A1-20090625-C00002.png)
JPH0163938U (US20090163788A1-20090625-C00002.png)
JPS58190333U (ja) 給湯兼用風呂釜装置
JPS6346769U (US20090163788A1-20090625-C00002.png)
JPH03112519U (US20090163788A1-20090625-C00002.png)
JPS58104838U (ja) 風呂釜システム
JPS62120184U (US20090163788A1-20090625-C00002.png)
JPS6185794U (US20090163788A1-20090625-C00002.png)
JPS6359257U (US20090163788A1-20090625-C00002.png)
JPS6214289U (US20090163788A1-20090625-C00002.png)
JPS6189689U (US20090163788A1-20090625-C00002.png)
JPS58103644U (ja) ヒ−トポンプ給湯機
JPS60143189U (ja) 温水自吸ポンプ装置
JPS641468U (US20090163788A1-20090625-C00002.png)
JPS63126517U (US20090163788A1-20090625-C00002.png)
JPH0178883U (US20090163788A1-20090625-C00002.png)
JPS63147653U (US20090163788A1-20090625-C00002.png)
JPS62117435U (US20090163788A1-20090625-C00002.png)
JPS61196593U (US20090163788A1-20090625-C00002.png)
JPS62156772U (US20090163788A1-20090625-C00002.png)
JPS62189580U (US20090163788A1-20090625-C00002.png)