JPS6148646U - - Google Patents

Info

Publication number

JPS6148646U

JPS6148646U JP13141884U JP13141884U JPS6148646U JP S6148646 U JPS6148646 U JP S6148646U JP 13141884 U JP13141884 U JP 13141884U JP 13141884 U JP13141884 U JP 13141884U JP S6148646 U JPS6148646 U JP S6148646U

Authority

JP

Japan

Prior art keywords

rotating shaft

sliding

ion beam

shaft

variable slit

Prior art date

1984-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 6
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
• 229910052799 carbon Inorganic materials 0.000 claims description 2
• 238000001816 cooling Methods 0.000 description 2
• 239000011888 foil Substances 0.000 description 1