JPS6143263U - タ−ンテ−ブルの位置決め停止装置 - Google Patents

タ−ンテ−ブルの位置決め停止装置

Info

Publication number
JPS6143263U
JPS6143263U JP12547784U JP12547784U JPS6143263U JP S6143263 U JPS6143263 U JP S6143263U JP 12547784 U JP12547784 U JP 12547784U JP 12547784 U JP12547784 U JP 12547784U JP S6143263 U JPS6143263 U JP S6143263U
Authority
JP
Japan
Prior art keywords
pin
turntable
lever
stopping device
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12547784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037390Y2 (enEXAMPLES
Inventor
慎一 福士
良孝 鹿野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP12547784U priority Critical patent/JPS6143263U/ja
Publication of JPS6143263U publication Critical patent/JPS6143263U/ja
Application granted granted Critical
Publication of JPH037390Y2 publication Critical patent/JPH037390Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12547784U 1984-08-17 1984-08-17 タ−ンテ−ブルの位置決め停止装置 Granted JPS6143263U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12547784U JPS6143263U (ja) 1984-08-17 1984-08-17 タ−ンテ−ブルの位置決め停止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12547784U JPS6143263U (ja) 1984-08-17 1984-08-17 タ−ンテ−ブルの位置決め停止装置

Publications (2)

Publication Number Publication Date
JPS6143263U true JPS6143263U (ja) 1986-03-20
JPH037390Y2 JPH037390Y2 (enEXAMPLES) 1991-02-25

Family

ID=30684168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12547784U Granted JPS6143263U (ja) 1984-08-17 1984-08-17 タ−ンテ−ブルの位置決め停止装置

Country Status (1)

Country Link
JP (1) JPS6143263U (enEXAMPLES)

Also Published As

Publication number Publication date
JPH037390Y2 (enEXAMPLES) 1991-02-25

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