JPS6142921Y2 - - Google Patents
Info
- Publication number
- JPS6142921Y2 JPS6142921Y2 JP17099182U JP17099182U JPS6142921Y2 JP S6142921 Y2 JPS6142921 Y2 JP S6142921Y2 JP 17099182 U JP17099182 U JP 17099182U JP 17099182 U JP17099182 U JP 17099182U JP S6142921 Y2 JPS6142921 Y2 JP S6142921Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- susceptor
- gas nozzle
- ejection holes
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 49
- 239000012495 reaction gas Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099182U JPS5976568U (ja) | 1982-11-11 | 1982-11-11 | 気相成長装置用ガスノズル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099182U JPS5976568U (ja) | 1982-11-11 | 1982-11-11 | 気相成長装置用ガスノズル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5976568U JPS5976568U (ja) | 1984-05-24 |
| JPS6142921Y2 true JPS6142921Y2 (enrdf_load_stackoverflow) | 1986-12-05 |
Family
ID=30373121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17099182U Granted JPS5976568U (ja) | 1982-11-11 | 1982-11-11 | 気相成長装置用ガスノズル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5976568U (enrdf_load_stackoverflow) |
-
1982
- 1982-11-11 JP JP17099182U patent/JPS5976568U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5976568U (ja) | 1984-05-24 |
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