JPS6142837A - Manufacture of image display device - Google Patents
Manufacture of image display deviceInfo
- Publication number
- JPS6142837A JPS6142837A JP16318584A JP16318584A JPS6142837A JP S6142837 A JPS6142837 A JP S6142837A JP 16318584 A JP16318584 A JP 16318584A JP 16318584 A JP16318584 A JP 16318584A JP S6142837 A JPS6142837 A JP S6142837A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- image display
- display device
- cases
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は真空外囲器を有する画像表示装置の製造方法に
関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing an image display device having a vacuum envelope.
従来例の構成とその問題点
本発明の対象である平板画像表示装置は、熱電子放出を
利用したもので、熱電子放出源から放出された電子ビー
ムを、多数の孔を設けた平面状電極群によシ、収束、偏
向、加速し、螢光体が塗布されている画像表示面の所望
の画素を発光させる構成を有している。第1図に平板画
像装置の真空外囲器の外観図を示す。この画像表示装置
の製造工程を表わしたブロックダイヤグラムを、第1図
に示す。Structure of the conventional example and its problems The flat panel image display device that is the object of the present invention utilizes thermionic emission. It has a configuration in which it converges, deflects, and accelerates the group to cause a desired pixel on the image display surface coated with a phosphor to emit light. FIG. 1 shows an external view of a vacuum envelope of a flat plate imaging device. A block diagram showing the manufacturing process of this image display device is shown in FIG.
製造工程の概簀は次のとおりである。まず、平板状電極
群(図示省略)を組立て(第2図4)、第1図の真空外
囲器1a、1°b中に組み込み、電気炉中で加熱して、
封着部材2を溶融して、封着6を行う。ここで真空外囲
器1a、1bは軟質ガラス(熱膨張係数100.5X1
0 )を、また封着部材2としては、熱膨張のマツチ
ングをとるため95〜100X10 の7す9トが用
いられる。封着工程終了後、排気管3から真空ポンプを
用いて第2図に示すように排気6し、〜1d−5)−ル
程度の圧力に保持しつつ、300〜350°C迄、加熱
して真空外囲器内部の脱ガス7を行う。脱ガス行程が終
了後、真空外囲器1内部の熱電子放出源の熱分解8を行
う。熱電子放出源としては、バリウム、ストロンチウム
、カルシウムの炭酸塩を真空中で酸化物に加熱分解した
ものを用いる。そして、加熱分解終了後、排気管3を加
熱して、封じ切フ9、ゲッターをフラッシュして、平板
画像表示装置が完成する。The outline of the manufacturing process is as follows. First, a flat electrode group (not shown) is assembled (Fig. 2, 4), incorporated into the vacuum envelopes 1a and 1°b shown in Fig. 1, and heated in an electric furnace.
The sealing member 2 is melted and sealing 6 is performed. Here, the vacuum envelopes 1a and 1b are made of soft glass (thermal expansion coefficient: 100.5×1
0), and as the sealing member 2, a 95 to 100 x 10 x 7 piece is used to match thermal expansion. After the sealing process is completed, the exhaust pipe 3 is evacuated as shown in FIG. 2 using a vacuum pump, and heated to 300 to 350°C while maintaining the pressure at about 1d-5). The inside of the vacuum envelope is degassed (7). After the degassing step is completed, thermal decomposition 8 of the thermionic emission source inside the vacuum envelope 1 is performed. As the thermionic emission source, carbonates of barium, strontium, and calcium are thermally decomposed into oxides in vacuum. After the thermal decomposition is completed, the exhaust pipe 3 is heated to flash the sealing flap 9 and the getter, thereby completing the flat panel image display device.
この平板画像表示装置は、耐圧を考慮して、真空外囲器
1を構成しているガラスの厚さは、10mmで、また内
容物が多い為、封着5、ペーキング工程1oで加熱した
場合、その昇温速度が速いと、画像表示装置内に温度勾
配が発生し、割れを生じやすい。その為、昇温速度を遅
くして割れを防ぐようにしているが、その為、封着、ペ
ーキング工程で長時間を要し、2工程で20時間はどが
がり、生産性が非常に悪い。In this flat panel image display device, in consideration of pressure resistance, the thickness of the glass constituting the vacuum envelope 1 is 10 mm, and since there is a large amount of contents, when heated in the sealing step 5 and the paking step 1o. If the rate of temperature increase is high, a temperature gradient will occur within the image display device, making it likely that cracks will occur. Therefore, the heating rate is slowed down to prevent cracking, but as a result, the sealing and paking processes take a long time, and the two processes take 20 hours, resulting in very low productivity. .
また、ペーキング工程で排気をする為に、排気管3を必
要とし、この排気管が、組立て時、損傷する可能性が大
きく、歩留シの低下をまねくことがある。その上封着工
程は酸化雰囲気中で行う為、電極等の内容物が酸化され
、電子ビームが正確に制御できない場合が生じてくる。Furthermore, an exhaust pipe 3 is required to exhaust air during the paking process, and there is a high possibility that this exhaust pipe will be damaged during assembly, which may lead to a decrease in yield. Moreover, since the sealing process is performed in an oxidizing atmosphere, the contents such as electrodes are oxidized, and the electron beam may not be accurately controlled.
゛発明の目的
本発明は、割れの原因となる熱処理工程を1回にし、内
容物の酸化を防ぎ、排気管を不要とし、生産性の良く平
板画像表示装置を製造することを目的とするものである
。゛Object of the Invention The object of the present invention is to reduce the heat treatment process that causes cracking to one time, prevent the oxidation of the contents, eliminate the need for an exhaust pipe, and manufacture a flat panel image display device with high productivity. It is.
発明の構成
不発#JI/i電極群を収納設置しfc真空外囲器を真
空中で加熱することによシ、封着等の熱処理工程を一度
に行うことを特徴とする。The structure of the invention is characterized in that heat treatment steps such as sealing are performed at once by housing and installing the unexploded #JI/i electrode group and heating the FC vacuum envelope in a vacuum.
実施例の説明
以下、本発明の実施例を図面を参照して説明する。第3
図は本発明の一実施例で用いられる真空槽の断面図であ
る。11は真空外囲器で封着前の拡大した分解図は第4
図に示されている。第4図における11a、11bは軟
質ガラスから成る真空外囲器半休で、封着部には、フリ
ット12が塗布されておシ、あらかじめ350″C以上
で30分間焼成されている。この真空外囲器半体11a
。DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. Third
The figure is a sectional view of a vacuum chamber used in an embodiment of the present invention. 11 is the vacuum envelope, and the enlarged exploded view before sealing is shown in 4th.
As shown in the figure. In Fig. 4, 11a and 11b are vacuum envelopes made of soft glass, the sealing part of which is coated with frit 12, and fired in advance at 350''C or higher for 30 minutes. Enclosure half body 11a
.
11bのコーナ一部の7リフト12のようには、突起1
2aを設け、真空外囲器1aと1bを重ねた時、隙間が
開くようにしである。この隙間は。7 lift 12 in the corner part of 11b, the protrusion 1
2a is provided so that a gap opens when the vacuum envelopes 1a and 1b are stacked. This gap is.
第3図における真空槽13を排気した時、真空外囲器1
1の内部も、真空槽13と同じ圧力に保持する為に設け
られる。なお、本実施例では7リフト12の一例として
、軟化点365°C1作業点436°Cの非晶質フリッ
トを用いた。When the vacuum chamber 13 in FIG. 3 is evacuated, the vacuum envelope 1
1 is also provided to maintain the same pressure as the vacuum chamber 13. In this example, as an example of the 7-lift 12, an amorphous frit with a softening point of 365°C and a working point of 436°C was used.
以上のような処理を施した真空外囲器11に電極等の部
品を組み込み真空槽13の中にセツティングし、真空ポ
ンプ14で真空槽13をI X 10−”トールに排気
する。この時、真空外囲器11の内部は真空槽13内部
のX生誕と同じになる。この真空外囲器11を、ヒータ
ー15を用いて加熱する。ヒーター16と真空外囲器1
1の位置関係は1.2〜3(111程度迄近接させて、
均熱性をよくしている。真空外囲器11の@度が350
℃になった時、陰極物質を加熱して酸化物に分解し、そ
の時発生する炭酸ガスを排気する。この行程は、7リツ
ト12の験化点370”Qに達する前に行う。陰極物質
の加熱分解終了後、X全外囲器11を、7リフト12の
作業点435℃迄加熱して、真空外8器11aと11b
を接着させ、室温迄冷却する。Components such as electrodes are assembled into the vacuum envelope 11 which has undergone the above treatment, and is set in the vacuum chamber 13, and the vacuum chamber 13 is evacuated to I.times.10-'' Torr using the vacuum pump 14.At this time, , the inside of the vacuum envelope 11 is the same as the X birth inside the vacuum chamber 13.This vacuum envelope 11 is heated using the heater 15.The heater 16 and the vacuum envelope 1
The positional relationship of 1 is 1.2 to 3 (close to about 111,
It has good heat uniformity. @ degree of vacuum envelope 11 is 350
When the temperature reaches ℃, the cathode material is heated and decomposed into oxides, and the carbon dioxide gas generated at that time is exhausted. This process is carried out before reaching the experimental point 370"Q of the 7 lifts 12. After the thermal decomposition of the cathode material is completed, the entire X envelope 11 is heated to the working point of 7 lifts 12, 435" Outer 8 vessels 11a and 11b
Glue and cool to room temperature.
以上のような工程にょシ、封着・ベーキングの2工程が
1工程で済み、製造時間が半分の10時間に短縮された
。また、真空中で封着される為如、電極等が酸化されな
くな)、電子ビームの制御への影響がなくなった。その
上、排気管も不要であるから、歩留シも向上し、また、
受像機として回路を組み込む場合も、排気管に制限され
なくなった。The two steps described above, sealing, and baking, are now reduced to one, and the manufacturing time is halved to 10 hours. In addition, since the electrodes are sealed in a vacuum, the electrodes are not oxidized), and there is no effect on electron beam control. Furthermore, since no exhaust pipe is required, yields are improved, and
When incorporating a circuit as a receiver, it is no longer limited to the exhaust pipe.
発明の効果
以上のように本発明は、真空雰囲気中で真空外囲器を封
着することKよシ、従来封着、ベーキング忙費やした時
間が半分に短縮され、かつ排気管を設ける必要がない為
、生産性が向上し、コストダウンを図ることができた。Effects of the Invention As described above, the present invention eliminates the need to seal a vacuum envelope in a vacuum atmosphere, reduces the time conventionally spent on sealing and baking by half, and eliminates the need to provide an exhaust pipe. As a result, productivity has improved and costs have been reduced.
また、画像表示装置を構成している電極の酸化が防止で
きる為、良好な画像を得ることが可能になった。Furthermore, since oxidation of the electrodes constituting the image display device can be prevented, it has become possible to obtain good images.
第1図は従来の平板画像表示装置の真空外囲器の斜視図
、第2図は画像表示装置の製造工程の工程図、第3図は
本発明の一実施例に用いる真空槽の断面図、第4図は本
発明の一実施例における平板画像表示装置の真空外囲器
の斜視図である。
11・・・・・・真空外囲器、12・・・・・・7リツ
)、12a・・・・・・突起、13・・・・・・真空槽
、14・・川・真空ポンプ、16・・・・・・、ヒータ
ー。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名第2
図
=1Fig. 1 is a perspective view of a vacuum envelope of a conventional flat panel image display device, Fig. 2 is a process diagram of the manufacturing process of the image display device, and Fig. 3 is a sectional view of a vacuum chamber used in an embodiment of the present invention. , FIG. 4 is a perspective view of a vacuum envelope of a flat panel image display device according to an embodiment of the present invention. 11...Vacuum envelope, 12...7), 12a...Protrusion, 13...Vacuum chamber, 14...Vacuum pump, 16... Heater. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure=1
Claims (5)
真空槽中に載置し、真空雰囲気中で、前記真空外囲器を
加熱、封着することを特徴とする画像表示装置の製造方
法。(1) An image display device characterized in that a vacuum envelope containing an electrode group is placed in a vacuum chamber in a non-airtight state, and the vacuum envelope is heated and sealed in a vacuum atmosphere. manufacturing method.
前に真空排気を開始し、前記封着部材が少なくとも固化
する迄排気を続けることを特徴とする特許請求の範囲第
1項記載の画像表示装置の製造方法。(2) Evacuation is started before the vacuum envelope is heated and its sealing member starts to soften, and evacuation is continued until at least the sealing member is solidified. A method of manufacturing the image display device described above.
ることを特徴とする特許請求の範囲第1項記載の画像表
示装置の製造方法。(3) A method for manufacturing an image display device according to claim 1, characterized in that means for heating the vacuum envelope is provided inside the vacuum chamber.
ることを特徴とする特許請求の範囲第1項記載の画像表
示装置の製造方法。(4) A method for manufacturing an image display device according to claim 1, characterized in that the pressure in the vacuum chamber is set to 1×10^-^3 Torr or less.
ことにより初期の非気密状態を得、加熱封着時には前記
突起を溶融させることを特徴とする特許請求の範囲第1
項記載の画像表示装置の製造方法。(5) An initial non-airtight state is obtained by providing one or more protrusions on the sealing member, and the protrusions are melted during heat sealing.
2. Method for manufacturing an image display device according to section 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16318584A JPS6142837A (en) | 1984-08-02 | 1984-08-02 | Manufacture of image display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16318584A JPS6142837A (en) | 1984-08-02 | 1984-08-02 | Manufacture of image display device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6142837A true JPS6142837A (en) | 1986-03-01 |
Family
ID=15768867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16318584A Pending JPS6142837A (en) | 1984-08-02 | 1984-08-02 | Manufacture of image display device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6142837A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2739490A1 (en) * | 1995-09-29 | 1997-04-04 | Micron Display Tech Inc | Field emission flat screen display |
US6254449B1 (en) | 1997-08-29 | 2001-07-03 | Canon Kabushiki Kaisha | Manufacturing method of image forming apparatus, manufacturing apparatus of image forming apparatus, image forming apparatus, manufacturing method of panel apparatus, and manufacturing apparatus of panel apparatus |
US6817917B1 (en) | 1999-05-28 | 2004-11-16 | Matsushita Electric Industrial Co., Ltd. | Manufacturing method for a plasma display panel with superior luminescence |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57176641A (en) * | 1981-04-24 | 1982-10-30 | Hitachi Ltd | Manufacture of color picture tube |
-
1984
- 1984-08-02 JP JP16318584A patent/JPS6142837A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57176641A (en) * | 1981-04-24 | 1982-10-30 | Hitachi Ltd | Manufacture of color picture tube |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2739490A1 (en) * | 1995-09-29 | 1997-04-04 | Micron Display Tech Inc | Field emission flat screen display |
US5997378A (en) * | 1995-09-29 | 1999-12-07 | Micron Technology, Inc. | Method for evacuating and sealing field emission displays |
US6254449B1 (en) | 1997-08-29 | 2001-07-03 | Canon Kabushiki Kaisha | Manufacturing method of image forming apparatus, manufacturing apparatus of image forming apparatus, image forming apparatus, manufacturing method of panel apparatus, and manufacturing apparatus of panel apparatus |
US6506089B2 (en) | 1997-08-29 | 2003-01-14 | Canon Kabushiki Kaisha | Manufacturing method of image forming apparatus, manufacturing apparatus of image forming apparatus, and manufacturing method of panel apparatus |
US6817917B1 (en) | 1999-05-28 | 2004-11-16 | Matsushita Electric Industrial Co., Ltd. | Manufacturing method for a plasma display panel with superior luminescence |
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