JPS6142416U

JPS6142416U - Photoelectric encoder

Info

Publication number: JPS6142416U
Application number: JP10261685U
Authority: JP
Inventors: 芳比古蒲谷; 康之宮井
Original assignee: 株式会社ミツトヨ
Priority date: 1985-07-04
Filing date: 1985-07-04
Publication date: 1986-03-19

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は、従来の光電型エンコーダの概略構成図、第２
図は、本考案に係る光電型エンコーダの第１実施例を示
す概略構成図、第３図は、本考案に係る第２光学格子の
一部省略平面図、第４図は、第２図の第２光学格子のＴ
Ｖ−ＩＶ断面図、第５図は、第１実施例装置の出力電圧
波形図、第６図は、第２光学格子の一例を示す説明図、
第７図は、第６図ｐ第２光学格子の等価回路図、第８図
は、第１実施例装置の第２光学格子の製造過程を説明す
る説明図、第９図は、本考案の好適な第２実施例を示す
構成説明図、第１０図は、本考案の好適な第３実施例を
示す概略構成図、である。１０・・・第１光学格子、１２・・・第２光学格子、１
４・・・基板、１４ａ・・・光透過部、１８・・・発光
器、２訃・・半導体基体、３４・・・半導体層、３６・
・・集電層。Figure 1 is a schematic configuration diagram of a conventional photoelectric encoder;
The figure is a schematic configuration diagram showing the first embodiment of the photoelectric encoder according to the present invention, FIG. 3 is a partially omitted plan view of the second optical grating according to the present invention, and FIG. T of the second optical grating
V-IV sectional view, FIG. 5 is an output voltage waveform diagram of the first embodiment device, FIG. 6 is an explanatory diagram showing an example of the second optical grating,
FIG. 7 is an equivalent circuit diagram of the second optical grating shown in FIG. FIG. 10 is a schematic configuration diagram showing a third preferred embodiment of the present invention. 10... First optical grating, 12... Second optical grating, 1
4...Substrate, 14a...Light transmitting portion, 18...Light emitter, 2...Semiconductor base, 34...Semiconductor layer, 36...
...Current collecting layer.

Claims

[Claims for Utility Model Registration] It has two pairs of optical gratings that move relative to each other, and the amount of relative movement of both optical gratings can be electrically controlled by utilizing the light and darkness that passes through or reflects one optical grating and reaches the other optical grating. In a photoelectric encoder that detects signals, a first optical grating has a first optical grating in which thin strip-shaped light transmitting parts or light reflecting parts are arranged in alignment on a substrate, and a thin strip-shaped semiconductor layer of an opposite conductivity type on a semiconductor substrate at a constant pitch. a second optical grating disposed opposite to the first optical grating; and a current collection layer made of a light-transmitting conductive material formed on substantially the entire surface of the semiconductor layer of the second optical grating. A photoelectric encoder comprising: