JPS6141969Y2 - - Google Patents

Info

Publication number
JPS6141969Y2
JPS6141969Y2 JP13063481U JP13063481U JPS6141969Y2 JP S6141969 Y2 JPS6141969 Y2 JP S6141969Y2 JP 13063481 U JP13063481 U JP 13063481U JP 13063481 U JP13063481 U JP 13063481U JP S6141969 Y2 JPS6141969 Y2 JP S6141969Y2
Authority
JP
Japan
Prior art keywords
chamber
working
working fluid
temperature
compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13063481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5835649U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13063481U priority Critical patent/JPS5835649U/ja
Publication of JPS5835649U publication Critical patent/JPS5835649U/ja
Application granted granted Critical
Publication of JPS6141969Y2 publication Critical patent/JPS6141969Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13063481U 1981-09-01 1981-09-01 発動機 Granted JPS5835649U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13063481U JPS5835649U (ja) 1981-09-01 1981-09-01 発動機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13063481U JPS5835649U (ja) 1981-09-01 1981-09-01 発動機

Publications (2)

Publication Number Publication Date
JPS5835649U JPS5835649U (ja) 1983-03-08
JPS6141969Y2 true JPS6141969Y2 (enrdf_load_stackoverflow) 1986-11-28

Family

ID=29924250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13063481U Granted JPS5835649U (ja) 1981-09-01 1981-09-01 発動機

Country Status (1)

Country Link
JP (1) JPS5835649U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142763A (ja) * 1985-12-18 1987-06-26 Hitachi Ltd スパツタ装置

Also Published As

Publication number Publication date
JPS5835649U (ja) 1983-03-08

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