JPS6141268Y2 - - Google Patents

Info

Publication number
JPS6141268Y2
JPS6141268Y2 JP17559982U JP17559982U JPS6141268Y2 JP S6141268 Y2 JPS6141268 Y2 JP S6141268Y2 JP 17559982 U JP17559982 U JP 17559982U JP 17559982 U JP17559982 U JP 17559982U JP S6141268 Y2 JPS6141268 Y2 JP S6141268Y2
Authority
JP
Japan
Prior art keywords
chamber
gas
laser
water
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17559982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981054U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17559982U priority Critical patent/JPS5981054U/ja
Publication of JPS5981054U publication Critical patent/JPS5981054U/ja
Application granted granted Critical
Publication of JPS6141268Y2 publication Critical patent/JPS6141268Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP17559982U 1982-11-22 1982-11-22 ガスレ−ザ発振装置 Granted JPS5981054U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17559982U JPS5981054U (ja) 1982-11-22 1982-11-22 ガスレ−ザ発振装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17559982U JPS5981054U (ja) 1982-11-22 1982-11-22 ガスレ−ザ発振装置

Publications (2)

Publication Number Publication Date
JPS5981054U JPS5981054U (ja) 1984-05-31
JPS6141268Y2 true JPS6141268Y2 (https=) 1986-11-25

Family

ID=30381994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17559982U Granted JPS5981054U (ja) 1982-11-22 1982-11-22 ガスレ−ザ発振装置

Country Status (1)

Country Link
JP (1) JPS5981054U (https=)

Also Published As

Publication number Publication date
JPS5981054U (ja) 1984-05-31

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