JPS6135519A - Alignment apparatus - Google Patents

Alignment apparatus

Info

Publication number
JPS6135519A
JPS6135519A JP15551384A JP15551384A JPS6135519A JP S6135519 A JPS6135519 A JP S6135519A JP 15551384 A JP15551384 A JP 15551384A JP 15551384 A JP15551384 A JP 15551384A JP S6135519 A JPS6135519 A JP S6135519A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
objective lens
reference marks
mask
lens system
position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15551384A
Inventor
Fumiyoshi Hamazaki
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To accurately and quickly carry out positioning of the objective lens system of optical system providing an optical scanning means by measuring distance of a particular reference mark from the scanning start point and the crossing position of said reference mark and scanning light.
CONSTITUTION: The reference marks 80, 80' for setting the reference position of objective lens system of a detection means are provided, the mask reference marks 80, 80' are scanned with laser beam of the detection means and the distance between the scanning start point and the mask reference marks 80, 80' and interval between the mask reference marks 71W74 are measured from the detected signal. The relative positioning can be done for mask reference mark by controlling the position of objective lens system based on such measured values and the objective lens alignment can be completed.
COPYRIGHT: (C)1986,JPO&Japio
JP15551384A 1984-07-27 1984-07-27 Alignment apparatus Pending JPS6135519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15551384A JPS6135519A (en) 1984-07-27 1984-07-27 Alignment apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15551384A JPS6135519A (en) 1984-07-27 1984-07-27 Alignment apparatus
US07080246 US4801808A (en) 1984-07-27 1987-07-28 Alignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical system

Publications (1)

Publication Number Publication Date
JPS6135519A true true JPS6135519A (en) 1986-02-20

Family

ID=15607692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15551384A Pending JPS6135519A (en) 1984-07-27 1984-07-27 Alignment apparatus

Country Status (1)

Country Link
JP (1) JPS6135519A (en)

Also Published As

Publication number Publication date Type
JPS06135519A (en) application

Similar Documents

Publication Publication Date Title
JPH01216306A (en) Focus detecting device having image pickup means
JPS61215905A (en) Position detecting device
JPS5644803A (en) System measuring for thickness of nonmetallic sheet like object
JPH0381082A (en) Method and apparatus for controlling diameter of laser beam
JPS6262205A (en) Surface irregularity inspection for object
JPH04211110A (en) Projection aligner and aligning method
JPS5745406A (en) Three-dimensional coordinate measuring device
JPS58108745A (en) Erroneous transcription adjusting device
JPH045509A (en) Automatic focusing device for optical inspection system
JPS63283129A (en) Alignment device
JPS6338915A (en) Auto-focusing spectacles
JPH02112709A (en) Method and device for alignment
JPS57138134A (en) Positioning device
JPS587136A (en) Method and device for projection type exposure
JPS63306626A (en) Focusing device
JPH01109263A (en) Method and apparatus for laser magnetic immunoassay
JPS6125011A (en) Optical distance measuring device
JPS5767815A (en) Measuring method for position of reflector using light
JPS6180018A (en) Color detecting apparatus
JPS6332303A (en) Alignment device
JPS60254615A (en) Electron beam exposure
JPS56130707A (en) Photo-printing device
JPS5616806A (en) Surface roughness measuring unit
JPS58112330A (en) Projection type exposure device
JPS57199909A (en) Distance measuring device