JPS6134252B2 - - Google Patents

Info

Publication number
JPS6134252B2
JPS6134252B2 JP55147090A JP14709080A JPS6134252B2 JP S6134252 B2 JPS6134252 B2 JP S6134252B2 JP 55147090 A JP55147090 A JP 55147090A JP 14709080 A JP14709080 A JP 14709080A JP S6134252 B2 JPS6134252 B2 JP S6134252B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55147090A
Other versions
JPS5771132A (en
Inventor
Mitsugi Yamamura
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Priority to JP55147090A priority Critical patent/JPS6134252B2/ja
Publication of JPS5771132A publication Critical patent/JPS5771132A/en
Publication of JPS6134252B2 publication Critical patent/JPS6134252B2/ja
Application status is Expired legal-status Critical

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B7/00Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
    • G03B7/08Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
    • G03B7/081Analogue circuits
    • G03B7/083Analogue circuits for control of exposure time
JP55147090A 1980-10-21 1980-10-21 Expired JPS6134252B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55147090A JPS6134252B2 (en) 1980-10-21 1980-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55147090A JPS6134252B2 (en) 1980-10-21 1980-10-21

Publications (2)

Publication Number Publication Date
JPS5771132A JPS5771132A (en) 1982-05-01
JPS6134252B2 true JPS6134252B2 (en) 1986-08-06

Family

ID=15422241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55147090A Expired JPS6134252B2 (en) 1980-10-21 1980-10-21

Country Status (1)

Country Link
JP (1) JPS6134252B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008118062A (en) * 2006-11-07 2008-05-22 Canon Inc Exposure apparatus, and method for manufacturing device
US8125614B2 (en) 2008-07-29 2012-02-28 Canon Kabushiki Kaisha Exposure apparatus and device manufacturing method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214771B2 (en) * 1982-09-20 1990-04-10 Nippon Kogaku Kk
JPS60198726A (en) * 1984-03-23 1985-10-08 Hitachi Ltd Method and apparatus for adjusting quantity of exposure of x-ray exposure device
JPH0715875B2 (en) * 1984-12-27 1995-02-22 キヤノン株式会社 EXPOSURE APPARATUS AND METHOD
JPH0797549B2 (en) * 1987-08-28 1995-10-18 東京エレクトロン九州株式会社 Exposure method and apparatus
JPH0795519B2 (en) * 1988-11-04 1995-10-11 ウシオ電機株式会社 Exposure control device in a wafer edge exposure
JP5025250B2 (en) 2006-12-15 2012-09-12 キヤノン株式会社 Exposure apparatus and device manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200723A (en) * 1963-03-29 1965-08-17 Polaroid Corp Shutter timing apparatus
US4021822A (en) * 1972-12-30 1977-05-03 Minolta Camera Kabushiki Kaisha Electrically controlled shutter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200723A (en) * 1963-03-29 1965-08-17 Polaroid Corp Shutter timing apparatus
US4021822A (en) * 1972-12-30 1977-05-03 Minolta Camera Kabushiki Kaisha Electrically controlled shutter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008118062A (en) * 2006-11-07 2008-05-22 Canon Inc Exposure apparatus, and method for manufacturing device
US8125614B2 (en) 2008-07-29 2012-02-28 Canon Kabushiki Kaisha Exposure apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPS5771132A (en) 1982-05-01

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