JPS6132907Y2 - - Google Patents
Info
- Publication number
- JPS6132907Y2 JPS6132907Y2 JP14700881U JP14700881U JPS6132907Y2 JP S6132907 Y2 JPS6132907 Y2 JP S6132907Y2 JP 14700881 U JP14700881 U JP 14700881U JP 14700881 U JP14700881 U JP 14700881U JP S6132907 Y2 JPS6132907 Y2 JP S6132907Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- vacuum pump
- pump
- vacuum
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 17
- 239000000428 dust Substances 0.000 claims description 13
- 230000003584 silencer Effects 0.000 claims description 5
- 230000030279 gene silencing Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 239000000843 powder Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 239000011344 liquid material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- -1 lumps Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
Landscapes
- Air Transport Of Granular Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14700881U JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14700881U JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5853724U JPS5853724U (ja) | 1983-04-12 |
| JPS6132907Y2 true JPS6132907Y2 (xx) | 1986-09-25 |
Family
ID=29939883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14700881U Granted JPS5853724U (ja) | 1981-10-01 | 1981-10-01 | 被処理物の吸入収納装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853724U (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5117052B2 (ja) * | 2006-04-26 | 2013-01-09 | 株式会社オーク製作所 | 露光装置および露光方法 |
-
1981
- 1981-10-01 JP JP14700881U patent/JPS5853724U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5853724U (ja) | 1983-04-12 |
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