JPS61292039A - Device for distriminating adsorption quantity of gas - Google Patents

Device for distriminating adsorption quantity of gas

Info

Publication number
JPS61292039A
JPS61292039A JP13346385A JP13346385A JPS61292039A JP S61292039 A JPS61292039 A JP S61292039A JP 13346385 A JP13346385 A JP 13346385A JP 13346385 A JP13346385 A JP 13346385A JP S61292039 A JPS61292039 A JP S61292039A
Authority
JP
Japan
Prior art keywords
gas
oscillator
vibrator
frequency
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13346385A
Other languages
Japanese (ja)
Inventor
Kiyoshi Inoue
潔 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP13346385A priority Critical patent/JPS61292039A/en
Publication of JPS61292039A publication Critical patent/JPS61292039A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To detect the trace gas in gas by discriminating the adsorption quantity thereof from the change in a resonance frequency characteristic when the gaseous molecules are adsorbed to an adsorptive material integrally fixed to an oscillator. CONSTITUTION:The oscillator 2 is a magnetostrictive oscillator wound with an excitation coil 5 and the gas component adsorptive material 4 formed porous is fixed to the top end of the horn 3. A rod 9 wound with an oscillation detecting coil 8 apart at a spacing therefrom is integrally mounted to the oscillator 2 to constitute the sensor. The coil 8 is connected to a detecting circuit 10. An excitation power source 11 sweeps the excitation coil 5 in a frequency range including the natural frequency of the oscillator 2. The gas to be inspected in the gas flowing in a passage 1 is adsorbed on the material 4 of the horn 3. The natural frequency of the oscillator 2 decreases with an increase in the weight in this stage and therefore the adsorption quantity is discriminated by utilizing such relation.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、気体中の微祉ガスを検出するガス吸着量判別
装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a gas adsorption amount determining device for detecting a weak gas in a gas.

(従来の技術) 気体中の特定ガスを検出する手段として、特定ガスを選
択的に吸着する物質を用い、そのガス吸着に伴なう導電
性の変化を検出す−ることによってガス吸着量の判別を
行なっている。
(Prior art) As a means of detecting a specific gas in a gas, a substance that selectively adsorbs the specific gas is used, and the amount of gas adsorbed can be reduced by detecting the change in conductivity that accompanies the adsorption of the gas. Making a judgment.

(発明が解決しようとする問題点) しかし、−F記の従来技術によれば、気中のガス含有率
がせいぜいtoppm以上でなければ検出で′きない。
(Problems to be Solved by the Invention) However, according to the prior art described in -F, the gas content in the air cannot be detected unless it is at most top per million.

゛(問題点を解決するための手段)   ゛本発明めガ
ス吸着量判別装置は、振動子に一体に固定され、1種以
上の特定ガスを吸着する吸着物質と、前記振動子が固有
振動数ないしその近傍の周波数で振動するように振動子
に電気信号を加える固定または可変周波数の起振電源と
、前記振動子の振動を検出するセン垂と、該センサによ
り検出される検出出力の共振振動特性からガス吸着量を
判別する演算装置とにより構成されるン(実施例) 以下本発明の一実施例を図面により説明する。
゛(Means for Solving the Problems) ゛The gas adsorption amount determining device of the present invention includes an adsorbing substance that is integrally fixed to a vibrator and that adsorbs one or more specific gases, and the vibrator has a natural frequency. A fixed or variable frequency excitation power supply that applies an electric signal to the vibrator so that it vibrates at or near a frequency, a sensor that detects the vibration of the vibrator, and a resonant vibration of the detection output detected by the sensor. (Embodiment) An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明による装置の一例を示し、lは検出すべ
きガスを含む気体を流す通路であり計測定対象は、通路
ではなく、部屋あるいは大気等で゛ある場合もある。振
動子2は励磁コイル5を巻装した磁歪振動子であり、ホ
ーン3の先端には多孔質に成形されたガス成分吸着物質
4が固着されている。該振動子2は取付は用フランジ6
を緩衝部材7を介して通路lのフレームに設置すること
により取付けられる。該振動子2には振動検出コイル8
を間隔を有して巻装したロッド9が一体に巻装されてセ
ンサを構成し、コイル8は検出回路lOに接続されてい
る。11は励磁コイル5に通電する起振電源であり、振
動子2の固有振動数を含む周波数範囲で周波数掃引する
ものである。制御装置12は、起振電源11の周波数可
変範囲の設定および検出回路10からの信号を演算装置
13にデータとして伝達する機能を有し、演算装置13
は、記憶装置14に記憶されているデータを参照して後
述の原理により吸着量を算出し、表示あるいは印字装置
でなる出力装置15から出力する構成を有する。
FIG. 1 shows an example of the apparatus according to the present invention, where l is a passage through which a gas containing the gas to be detected flows, and the object to be measured may be a room or the atmosphere, etc., instead of the passage. The vibrator 2 is a magnetostrictive vibrator having an excitation coil 5 wound thereon, and a porous gas component adsorbing material 4 is fixed to the tip of the horn 3. The vibrator 2 is mounted on a flange 6.
It is attached by installing it on the frame of the passage 1 via the buffer member 7. The vibrator 2 includes a vibration detection coil 8.
A rod 9, which is wound at intervals, is integrally wound to constitute a sensor, and the coil 8 is connected to a detection circuit IO. Reference numeral 11 denotes an excitation power source that energizes the excitation coil 5 and sweeps the frequency in a frequency range that includes the natural frequency of the vibrator 2. The control device 12 has a function of setting the frequency variable range of the excitation power source 11 and transmitting a signal from the detection circuit 10 as data to the arithmetic device 13.
has a configuration in which the adsorption amount is calculated based on the principle described later with reference to data stored in the storage device 14, and outputted from the output device 15, which is a display or printing device.

この装置において、第3図に示すように、ホーン3およ
び吸着物質4を含む振動子2の重量と固有振動数fとは
相関関係があり、重量増大に伴なって固有振動数fが低
下する関係にあることを利用して吸着量を判別する。す
なわち、まず、吸着量が零あるいは基準量である時、起
振電源llにより出力周波数を可変させながら、第2図
の曲線16で示すような周波数に対応した検出回路lO
による検出出力を制御装置12を介して演算装置13に
入力する。演算装置13は、ピーク保持手段によって検
出出力のピークを検出し、その時の周波数、すなわち共
振周波数f1を記憶装置13に記憶しておき、一方、吸
着物質4にガス分子を吸着させた後、前記と同様の起振
電源11による周波数掃引を行なって第2図の曲線17
に示すような検出出力を得、ピーク検出による共振周波
数f2の検出を行ない、周波数の差fl−f、−Δfを
求め、これから吸着量ΔWを算出し、出力装置15から
出力する。
In this device, as shown in FIG. 3, there is a correlation between the weight of the vibrator 2 including the horn 3 and the adsorbed substance 4 and the natural frequency f, and as the weight increases, the natural frequency f decreases. The amount of adsorption is determined using the relationship. That is, first, when the adsorption amount is zero or the reference amount, the detection circuit lO corresponding to the frequency shown by the curve 16 in FIG.
The detection output is input to the arithmetic unit 13 via the control device 12. The arithmetic device 13 detects the peak of the detection output by the peak holding means, and stores the frequency at that time, that is, the resonance frequency f1, in the storage device 13. On the other hand, after adsorbing the gas molecules to the adsorbent substance 4, the A frequency sweep using the excitation power source 11 similar to that shown in FIG.
A detection output as shown in is obtained, a resonance frequency f2 is detected by peak detection, a frequency difference fl-f, -Δf is obtained, an adsorption amount ΔW is calculated from this, and the output device 15 outputs it.

このような装置による吸着量検出を行なう場合、吸着物
質4として5n02にPdを微量加えたものにNb20
B等の遷移金属を微量加えてプロパンガスの検出を行な
った場合、約5PP鵬程度のガス含有量であっても検出
可能であった。
When detecting the amount of adsorption using such a device, Nb20 is added to 5n02 with a trace amount of Pd added as adsorbent material 4.
When propane gas was detected by adding a small amount of transition metal such as B, it was possible to detect the gas even if the gas content was about 5 PP.

第4図および第5図は本発明の他の実施例であり、本実
施例は、振動子2′は電歪振動子、起振電源11’とし
て、固定周波数の交流電圧を発生させるものを用い、圧
電型センサやストレンゲージ型センサー8により検出し
た振動出力の大きさを演 □算装置13’に出力し1.
演算装置13’は、吸着量が零あるいは基準量である時
(周波数がf+)の検出出力P、と、吸着後の検出出力
P2とから、P、 −P2−ΔPAを算出し、記憶装置
14に予め記憶されているΔPと吸着量との関係からΔ
aに対応する吸着量を求め、出力装置15より出力する
。第5図に示すピーク値どうしの差ΔP、から吸着量を
算出するようにしてもよい。このような方式でも前記と
同様の精度でガスの検出が可能となる。
4 and 5 show other embodiments of the present invention. In this embodiment, the vibrator 2' is an electrostrictive vibrator, and the excitation power source 11' generates an alternating current voltage with a fixed frequency. □Output the magnitude of the vibration output detected by the piezoelectric sensor or strain gauge sensor 8 to the computing device 13'.1.
The calculation device 13' calculates P, -P2-ΔPA from the detection output P when the adsorption amount is zero or the reference amount (frequency is f+) and the detection output P2 after adsorption, and calculates P, -P2-ΔPA. From the relationship between ΔP and adsorption amount stored in advance, Δ
The adsorption amount corresponding to a is determined and output from the output device 15. The adsorption amount may be calculated from the difference ΔP between the peak values shown in FIG. Even with this method, gas can be detected with the same accuracy as described above.

なお、本発明において用いられる吸着物質としては、5
n02を基材とするものの他、ZnO1鴫 T i 02.、 WO3、C0304、In304、
Col、xMg、)(0,ye Fe203 、V20
5、MgFe2 o4.BaTiOx等の酸化物あるい
はこれらに話加物を加えたもの、あるいはカーボン、ア
ントラセン、Cu−フタロシアニン、ポリビニルカルバ
ゾル等が用いられる。
Note that the adsorbent used in the present invention includes 5
In addition to those based on n02, ZnO1T i 02. , WO3, C0304, In304,
Col, xMg, ) (0,ye Fe203, V20
5, MgFe2 o4. Oxides such as BaTiOx or additives thereof, carbon, anthracene, Cu-phthalocyanine, polyvinyl carbazole, etc. are used.

(発明の効果) 本発明によれば、振動子に一体に固定した吸着物質にガ
ス分子が吸着した場合の共振周波数特性の変化から吸着
量を判別するようにしたので、従来よりも微量のガスを
検出することができる。
(Effects of the Invention) According to the present invention, since the amount of adsorption is determined from the change in resonance frequency characteristics when gas molecules are adsorbed to the adsorbent substance integrally fixed to the vibrator, the amount of adsorption is determined from the change in the resonance frequency characteristics. can be detected.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す構成図、第2図および
第3図は該実施例の動作原理を説明する説明図、第4図
は本発明の他の実施例を示す構成図、第5図は第4図の
実施例の動作原理を説明する説明図である。
FIG. 1 is a block diagram showing one embodiment of the present invention, FIGS. 2 and 3 are explanatory diagrams explaining the operating principle of the embodiment, and FIG. 4 is a block diagram showing another embodiment of the present invention. , FIG. 5 is an explanatory diagram illustrating the operating principle of the embodiment of FIG. 4.

Claims (1)

【特許請求の範囲】[Claims] 振動子に一体に固定され、1種以上の特定ガス分子を吸
着する吸着物質と、前記振動子が固有振動数ないしその
近傍の周波数で振動するように振動子に電気信号を加え
る可変または固定周波数の起振電源と、前記振動子の振
動を検出するセンサと、該センサにより検出される検出
出力の共振振動特性からガス吸着量を判別する演算装置
とにより構成されることを特徴とするガス吸着量判別装
置。
An adsorbent that is integrally fixed to the vibrator and adsorbs one or more specific gas molecules, and a variable or fixed frequency that applies an electrical signal to the vibrator so that the vibrator vibrates at or near its natural frequency. A gas adsorption device comprising: an excitation power source; a sensor that detects the vibration of the vibrator; and an arithmetic device that determines the amount of gas adsorption from the resonance vibration characteristics of the detection output detected by the sensor. Quantity discrimination device.
JP13346385A 1985-06-19 1985-06-19 Device for distriminating adsorption quantity of gas Pending JPS61292039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13346385A JPS61292039A (en) 1985-06-19 1985-06-19 Device for distriminating adsorption quantity of gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13346385A JPS61292039A (en) 1985-06-19 1985-06-19 Device for distriminating adsorption quantity of gas

Publications (1)

Publication Number Publication Date
JPS61292039A true JPS61292039A (en) 1986-12-22

Family

ID=15105369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13346385A Pending JPS61292039A (en) 1985-06-19 1985-06-19 Device for distriminating adsorption quantity of gas

Country Status (1)

Country Link
JP (1) JPS61292039A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03140856A (en) * 1989-10-27 1991-06-14 Kyoshiro Seki Ultrasonic system for measuring humidity and gas concentration
JP2006234791A (en) * 2005-01-26 2006-09-07 Seiko Instruments Inc Reactor, microreactor chip, microreactor system and method for manufacturing the reactor
WO2022196391A1 (en) * 2021-03-15 2022-09-22 国立大学法人東北大学 Load sensor, and load detecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03140856A (en) * 1989-10-27 1991-06-14 Kyoshiro Seki Ultrasonic system for measuring humidity and gas concentration
JP2006234791A (en) * 2005-01-26 2006-09-07 Seiko Instruments Inc Reactor, microreactor chip, microreactor system and method for manufacturing the reactor
JP4694945B2 (en) * 2005-01-26 2011-06-08 セイコーインスツル株式会社 Reactor, microreactor chip, microreactor system, and method for manufacturing reactor
WO2022196391A1 (en) * 2021-03-15 2022-09-22 国立大学法人東北大学 Load sensor, and load detecting device

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