JPS6129144B2 - - Google Patents

Info

Publication number
JPS6129144B2
JPS6129144B2 JP15513478A JP15513478A JPS6129144B2 JP S6129144 B2 JPS6129144 B2 JP S6129144B2 JP 15513478 A JP15513478 A JP 15513478A JP 15513478 A JP15513478 A JP 15513478A JP S6129144 B2 JPS6129144 B2 JP S6129144B2
Authority
JP
Japan
Prior art keywords
conductive layer
insulating film
semiconductor
manufacturing
semiconductor conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15513478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5582451A (en
Inventor
Takashi Yamamoto
Shinpei Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15513478A priority Critical patent/JPS5582451A/ja
Publication of JPS5582451A publication Critical patent/JPS5582451A/ja
Publication of JPS6129144B2 publication Critical patent/JPS6129144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Non-Volatile Memory (AREA)
JP15513478A 1978-12-14 1978-12-14 Manufacture of semiconductor device Granted JPS5582451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15513478A JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15513478A JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5582451A JPS5582451A (en) 1980-06-21
JPS6129144B2 true JPS6129144B2 (cs) 1986-07-04

Family

ID=15599289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15513478A Granted JPS5582451A (en) 1978-12-14 1978-12-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5582451A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204174A (en) * 1981-06-09 1982-12-14 Fujitsu Ltd Manufacture of semiconductor device
JPS6052059A (ja) * 1983-08-31 1985-03-23 Toshiba Corp 半導体装置の製造方法
IT1224606B (it) * 1988-10-10 1990-10-04 Eniricerche Spa Sensore chimico monolitico a membrana ione selettiva di tipo chemfet eprocedimento per la sua realizzazione

Also Published As

Publication number Publication date
JPS5582451A (en) 1980-06-21

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