JPS6128326B2 - - Google Patents
Info
- Publication number
- JPS6128326B2 JPS6128326B2 JP15446883A JP15446883A JPS6128326B2 JP S6128326 B2 JPS6128326 B2 JP S6128326B2 JP 15446883 A JP15446883 A JP 15446883A JP 15446883 A JP15446883 A JP 15446883A JP S6128326 B2 JPS6128326 B2 JP S6128326B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15446883A JPS6128326B2 (en) | 1983-08-23 | 1983-08-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15446883A JPS6128326B2 (en) | 1983-08-23 | 1983-08-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6045301A JPS6045301A (en) | 1985-03-11 |
JPS6128326B2 true JPS6128326B2 (en) | 1986-06-30 |
Family
ID=15584903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15446883A Expired JPS6128326B2 (en) | 1983-08-23 | 1983-08-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6128326B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0283716U (en) * | 1988-12-15 | 1990-06-28 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3120825B2 (en) * | 1994-11-14 | 2000-12-25 | 信越半導体株式会社 | Epitaxial wafer and method for manufacturing the same |
-
1983
- 1983-08-23 JP JP15446883A patent/JPS6128326B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0283716U (en) * | 1988-12-15 | 1990-06-28 |
Also Published As
Publication number | Publication date |
---|---|
JPS6045301A (en) | 1985-03-11 |