JPS6128216B2 - - Google Patents
Info
- Publication number
- JPS6128216B2 JPS6128216B2 JP2893578A JP2893578A JPS6128216B2 JP S6128216 B2 JPS6128216 B2 JP S6128216B2 JP 2893578 A JP2893578 A JP 2893578A JP 2893578 A JP2893578 A JP 2893578A JP S6128216 B2 JPS6128216 B2 JP S6128216B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pellet
- pellets
- dicing
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 35
- 235000012431 wafers Nutrition 0.000 claims description 35
- 238000005453 pelletization Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2893578A JPS54121059A (en) | 1978-03-13 | 1978-03-13 | Automatic positioning method for pelletized wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2893578A JPS54121059A (en) | 1978-03-13 | 1978-03-13 | Automatic positioning method for pelletized wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54121059A JPS54121059A (en) | 1979-09-19 |
| JPS6128216B2 true JPS6128216B2 (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=12262249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2893578A Granted JPS54121059A (en) | 1978-03-13 | 1978-03-13 | Automatic positioning method for pelletized wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54121059A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6265436A (ja) * | 1985-09-18 | 1987-03-24 | Tokyo Sokuhan Kk | ダイボンダにおけるウエハ−位置制御方法 |
-
1978
- 1978-03-13 JP JP2893578A patent/JPS54121059A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54121059A (en) | 1979-09-19 |
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