JPS6128080Y2 - - Google Patents
Info
- Publication number
- JPS6128080Y2 JPS6128080Y2 JP6272780U JP6272780U JPS6128080Y2 JP S6128080 Y2 JPS6128080 Y2 JP S6128080Y2 JP 6272780 U JP6272780 U JP 6272780U JP 6272780 U JP6272780 U JP 6272780U JP S6128080 Y2 JPS6128080 Y2 JP S6128080Y2
- Authority
- JP
- Japan
- Prior art keywords
- working fluid
- valve
- reservoir
- vacuum device
- boiler room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 37
- 238000009792 diffusion process Methods 0.000 claims description 22
- 238000010992 reflux Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272780U JPS6128080Y2 (enrdf_load_stackoverflow) | 1980-05-08 | 1980-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272780U JPS6128080Y2 (enrdf_load_stackoverflow) | 1980-05-08 | 1980-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56163800U JPS56163800U (enrdf_load_stackoverflow) | 1981-12-04 |
| JPS6128080Y2 true JPS6128080Y2 (enrdf_load_stackoverflow) | 1986-08-20 |
Family
ID=29657023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6272780U Expired JPS6128080Y2 (enrdf_load_stackoverflow) | 1980-05-08 | 1980-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6128080Y2 (enrdf_load_stackoverflow) |
-
1980
- 1980-05-08 JP JP6272780U patent/JPS6128080Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56163800U (enrdf_load_stackoverflow) | 1981-12-04 |
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