JPS61234307A - Optical measuring apparatus - Google Patents

Optical measuring apparatus

Info

Publication number
JPS61234307A
JPS61234307A JP7576885A JP7576885A JPS61234307A JP S61234307 A JPS61234307 A JP S61234307A JP 7576885 A JP7576885 A JP 7576885A JP 7576885 A JP7576885 A JP 7576885A JP S61234307 A JPS61234307 A JP S61234307A
Authority
JP
Japan
Prior art keywords
cylindrical lens
optical axis
mirror
lens
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7576885A
Other languages
Japanese (ja)
Inventor
Yoshiharu Kuwabara
Taizo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MITSUTOYO Manufacturing CORP
MITSUTOYO SEISAKUSHO
Original Assignee
MITSUTOYO Manufacturing CORP
MITSUTOYO SEISAKUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MITSUTOYO Manufacturing CORP, MITSUTOYO SEISAKUSHO filed Critical MITSUTOYO Manufacturing CORP
Priority to JP7576885A priority Critical patent/JPS61234307A/en
Publication of JPS61234307A publication Critical patent/JPS61234307A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means

Abstract

PURPOSE:To prevent deviation of a scanning surface of parallel scanning beams from the optical axis, by installing in the respective specified positions the No.1 cylindrical lens between on ftheta lens and a specimen to be measured and the No.2 cylindrical lens between a beam generator and a polygonal rotary mirror. CONSTITUTION:An incident beam 12 issued from a laser tube 10, after reflected through a right angle, by a stationary mirror 14A, passes through the No.2 cylindrical lens 48 and here, after shrinkage of its beam diameter in the direction in which major axis 48A of this cylindrical lens 48 and the optical axis intersect, the beam is reflected by a stationary mirror 14B and irradiated into a reflecting surface of a polygonal rotary mirror 16. When the reflecting surface of the mirror 16 happens to be tilted, as the focal length of the No.1 cylindrical lens 46 is mode equal to a distance f1 up to a scanning position relative to the specimen to be measured, the parallel beams incident to the lens 46 pass through the focus F, even if their distance from the central optical axis 18A is significant. Accordingly, the scanning surface of the beam can be kept undeviated from the optical axis.
JP7576885A 1985-04-10 1985-04-10 Optical measuring apparatus Pending JPS61234307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7576885A JPS61234307A (en) 1985-04-10 1985-04-10 Optical measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7576885A JPS61234307A (en) 1985-04-10 1985-04-10 Optical measuring apparatus

Publications (1)

Publication Number Publication Date
JPS61234307A true JPS61234307A (en) 1986-10-18

Family

ID=13585714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7576885A Pending JPS61234307A (en) 1985-04-10 1985-04-10 Optical measuring apparatus

Country Status (1)

Country Link
JP (1) JPS61234307A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134618A (en) * 1982-02-05 1983-08-10 Ricoh Co Ltd Scanning optical system having inclination compensating function provided with semiconductor laser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134618A (en) * 1982-02-05 1983-08-10 Ricoh Co Ltd Scanning optical system having inclination compensating function provided with semiconductor laser

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