JPS61234054A - 集積半導体装置 - Google Patents

集積半導体装置

Info

Publication number
JPS61234054A
JPS61234054A JP9453786A JP9453786A JPS61234054A JP S61234054 A JPS61234054 A JP S61234054A JP 9453786 A JP9453786 A JP 9453786A JP 9453786 A JP9453786 A JP 9453786A JP S61234054 A JPS61234054 A JP S61234054A
Authority
JP
Japan
Prior art keywords
crystal silicon
island
semiconductor device
wiring
silicon island
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9453786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227543B2 (enrdf_load_stackoverflow
Inventor
Shigeru Kawamata
川又　繁
Kiyoshi Tsukuda
佃　清
Yoshikazu Hosokawa
細川　義和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9453786A priority Critical patent/JPS61234054A/ja
Publication of JPS61234054A publication Critical patent/JPS61234054A/ja
Publication of JPS6227543B2 publication Critical patent/JPS6227543B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9453786A 1986-04-25 1986-04-25 集積半導体装置 Granted JPS61234054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9453786A JPS61234054A (ja) 1986-04-25 1986-04-25 集積半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9453786A JPS61234054A (ja) 1986-04-25 1986-04-25 集積半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP13002679A Division JPS5655061A (en) 1979-10-11 1979-10-11 Integrated semiconductor device

Publications (2)

Publication Number Publication Date
JPS61234054A true JPS61234054A (ja) 1986-10-18
JPS6227543B2 JPS6227543B2 (enrdf_load_stackoverflow) 1987-06-15

Family

ID=14113068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9453786A Granted JPS61234054A (ja) 1986-04-25 1986-04-25 集積半導体装置

Country Status (1)

Country Link
JP (1) JPS61234054A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387817A (en) * 1991-12-02 1995-02-07 Oki Electric Industry Co., Ltd. Dielectric isolation substrate having single-crystal silicon islands surrounded by groove and lower conductive layer filling the groove therewith

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387817A (en) * 1991-12-02 1995-02-07 Oki Electric Industry Co., Ltd. Dielectric isolation substrate having single-crystal silicon islands surrounded by groove and lower conductive layer filling the groove therewith

Also Published As

Publication number Publication date
JPS6227543B2 (enrdf_load_stackoverflow) 1987-06-15

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