JPS6122457B2 - - Google Patents

Info

Publication number
JPS6122457B2
JPS6122457B2 JP52144336A JP14433677A JPS6122457B2 JP S6122457 B2 JPS6122457 B2 JP S6122457B2 JP 52144336 A JP52144336 A JP 52144336A JP 14433677 A JP14433677 A JP 14433677A JP S6122457 B2 JPS6122457 B2 JP S6122457B2
Authority
JP
Japan
Prior art keywords
emulsion
layer
emulsion layer
image
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52144336A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5477070A (en
Inventor
Akira Morishige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14433677A priority Critical patent/JPS5477070A/ja
Publication of JPS5477070A publication Critical patent/JPS5477070A/ja
Publication of JPS6122457B2 publication Critical patent/JPS6122457B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14433677A 1977-12-01 1977-12-01 Production of photo mask Granted JPS5477070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14433677A JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14433677A JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Publications (2)

Publication Number Publication Date
JPS5477070A JPS5477070A (en) 1979-06-20
JPS6122457B2 true JPS6122457B2 (https=) 1986-05-31

Family

ID=15359733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14433677A Granted JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Country Status (1)

Country Link
JP (1) JPS5477070A (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4018938A (en) * 1975-06-30 1977-04-19 International Business Machines Corporation Fabrication of high aspect ratio masks
JPS52136001A (en) * 1976-05-10 1977-11-14 Dainippon Printing Co Ltd Method of adjusting dimensions of lines on photo mask

Also Published As

Publication number Publication date
JPS5477070A (en) 1979-06-20

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