JPS61210310A - 自動焦点合せ装置 - Google Patents

自動焦点合せ装置

Info

Publication number
JPS61210310A
JPS61210310A JP60050527A JP5052785A JPS61210310A JP S61210310 A JPS61210310 A JP S61210310A JP 60050527 A JP60050527 A JP 60050527A JP 5052785 A JP5052785 A JP 5052785A JP S61210310 A JPS61210310 A JP S61210310A
Authority
JP
Japan
Prior art keywords
standard deviation
photoelectric conversion
optical system
signal
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60050527A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226206B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Makabe
英一 真壁
Mitsuaki Uesugi
上杉　満昭
Masakazu Inomata
雅一 猪股
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP60050527A priority Critical patent/JPS61210310A/ja
Publication of JPS61210310A publication Critical patent/JPS61210310A/ja
Publication of JPH0226206B2 publication Critical patent/JPH0226206B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP60050527A 1985-03-15 1985-03-15 自動焦点合せ装置 Granted JPS61210310A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60050527A JPS61210310A (ja) 1985-03-15 1985-03-15 自動焦点合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60050527A JPS61210310A (ja) 1985-03-15 1985-03-15 自動焦点合せ装置

Publications (2)

Publication Number Publication Date
JPS61210310A true JPS61210310A (ja) 1986-09-18
JPH0226206B2 JPH0226206B2 (enrdf_load_stackoverflow) 1990-06-08

Family

ID=12861456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60050527A Granted JPS61210310A (ja) 1985-03-15 1985-03-15 自動焦点合せ装置

Country Status (1)

Country Link
JP (1) JPS61210310A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04305609A (ja) * 1991-04-03 1992-10-28 Sharp Corp オートフォーカス装置
KR20030019142A (ko) * 2001-08-28 2003-03-06 닛본 덴기 가부시끼가이샤 레티클 검사 장치
JP2007101623A (ja) * 2005-09-30 2007-04-19 Sysmex Corp 自動顕微鏡及びこれを備える分析装置
GB2475983A (en) * 2009-12-07 2011-06-08 Hiok Nam Tay Reflection symmetry of gradient profile associated with an edge
JP2013072801A (ja) * 2011-09-28 2013-04-22 Nippon Reliance Kk 表面検査装置を調整するためのデータを出力する調整装置、調整データ出力方法及びプログラム
US9065999B2 (en) 2011-03-24 2015-06-23 Hiok Nam Tay Method and apparatus for evaluating sharpness of image

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04305609A (ja) * 1991-04-03 1992-10-28 Sharp Corp オートフォーカス装置
KR20030019142A (ko) * 2001-08-28 2003-03-06 닛본 덴기 가부시끼가이샤 레티클 검사 장치
JP2007101623A (ja) * 2005-09-30 2007-04-19 Sysmex Corp 自動顕微鏡及びこれを備える分析装置
GB2475983A (en) * 2009-12-07 2011-06-08 Hiok Nam Tay Reflection symmetry of gradient profile associated with an edge
GB2475983B (en) * 2009-12-07 2013-03-13 Hiok Nam Tay Auto-focus image system
US9251571B2 (en) 2009-12-07 2016-02-02 Hiok Nam Tay Auto-focus image system
US9734562B2 (en) 2009-12-07 2017-08-15 Hiok Nam Tay Auto-focus image system
US9065999B2 (en) 2011-03-24 2015-06-23 Hiok Nam Tay Method and apparatus for evaluating sharpness of image
JP2013072801A (ja) * 2011-09-28 2013-04-22 Nippon Reliance Kk 表面検査装置を調整するためのデータを出力する調整装置、調整データ出力方法及びプログラム

Also Published As

Publication number Publication date
JPH0226206B2 (enrdf_load_stackoverflow) 1990-06-08

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