JPS61209330A - Ｓａｗパワ−センサ - Google Patents
Ｓａｗパワ−センサInfo
- Publication number
- JPS61209330A JPS61209330A JP60049289A JP4928985A JPS61209330A JP S61209330 A JPS61209330 A JP S61209330A JP 60049289 A JP60049289 A JP 60049289A JP 4928985 A JP4928985 A JP 4928985A JP S61209330 A JPS61209330 A JP S61209330A
- Authority
- JP
- Japan
- Prior art keywords
- saw
- electrode
- surface acoustic
- heating element
- delay line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims description 50
- 230000008859 change Effects 0.000 claims description 10
- 230000020169 heat generation Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 230000004304 visual acuity Effects 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 10
- 230000010355 oscillation Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60049289A JPS61209330A (ja) | 1985-03-14 | 1985-03-14 | Ｓａｗパワ−センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60049289A JPS61209330A (ja) | 1985-03-14 | 1985-03-14 | Ｓａｗパワ−センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61209330A true JPS61209330A (ja) | 1986-09-17 |
| JPH0476420B2 JPH0476420B2 (enrdf_load_stackoverflow) | 1992-12-03 |
Family
ID=12826733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60049289A Granted JPS61209330A (ja) | 1985-03-14 | 1985-03-14 | Ｓａｗパワ−センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61209330A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108508265A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
| CN108508264A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
| CN108508263A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
-
1985
- 1985-03-14 JP JP60049289A patent/JPS61209330A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108508265A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
| CN108508264A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
| CN108508263A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
| CN108508263B (zh) * | 2017-09-27 | 2020-04-17 | 中国计量科学研究院 | 功率传感器 |
| CN108508265B (zh) * | 2017-09-27 | 2020-05-05 | 中国计量科学研究院 | 功率传感器 |
| CN108508264B (zh) * | 2017-09-27 | 2020-05-05 | 中国计量科学研究院 | 功率传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476420B2 (enrdf_load_stackoverflow) | 1992-12-03 |
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