JPS61206666U - - Google Patents

Info

Publication number
JPS61206666U
JPS61206666U JP8862685U JP8862685U JPS61206666U JP S61206666 U JPS61206666 U JP S61206666U JP 8862685 U JP8862685 U JP 8862685U JP 8862685 U JP8862685 U JP 8862685U JP S61206666 U JPS61206666 U JP S61206666U
Authority
JP
Japan
Prior art keywords
cooling
built
chamber
gas
oxidizing gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8862685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8862685U priority Critical patent/JPS61206666U/ja
Publication of JPS61206666U publication Critical patent/JPS61206666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Tunnel Furnaces (AREA)
JP8862685U 1985-06-11 1985-06-11 Pending JPS61206666U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8862685U JPS61206666U (US20080293856A1-20081127-C00150.png) 1985-06-11 1985-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8862685U JPS61206666U (US20080293856A1-20081127-C00150.png) 1985-06-11 1985-06-11

Publications (1)

Publication Number Publication Date
JPS61206666U true JPS61206666U (US20080293856A1-20081127-C00150.png) 1986-12-27

Family

ID=30641941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8862685U Pending JPS61206666U (US20080293856A1-20081127-C00150.png) 1985-06-11 1985-06-11

Country Status (1)

Country Link
JP (1) JPS61206666U (US20080293856A1-20081127-C00150.png)

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