JPS6120558U - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS6120558U
JPS6120558U JP10308484U JP10308484U JPS6120558U JP S6120558 U JPS6120558 U JP S6120558U JP 10308484 U JP10308484 U JP 10308484U JP 10308484 U JP10308484 U JP 10308484U JP S6120558 U JPS6120558 U JP S6120558U
Authority
JP
Japan
Prior art keywords
shaped heater
electrode
vacuum deposition
deposition equipment
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10308484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238924Y2 (en:Method
Inventor
行弘 浜田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Energy Ltd filed Critical Hitachi Maxell Energy Ltd
Priority to JP10308484U priority Critical patent/JPS6120558U/ja
Publication of JPS6120558U publication Critical patent/JPS6120558U/ja
Application granted granted Critical
Publication of JPH0238924Y2 publication Critical patent/JPH0238924Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10308484U 1984-07-10 1984-07-10 真空蒸着装置 Granted JPS6120558U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10308484U JPS6120558U (ja) 1984-07-10 1984-07-10 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10308484U JPS6120558U (ja) 1984-07-10 1984-07-10 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS6120558U true JPS6120558U (ja) 1986-02-06
JPH0238924Y2 JPH0238924Y2 (en:Method) 1990-10-19

Family

ID=30662479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10308484U Granted JPS6120558U (ja) 1984-07-10 1984-07-10 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS6120558U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359363U (en:Method) * 1989-10-11 1991-06-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359363U (en:Method) * 1989-10-11 1991-06-11

Also Published As

Publication number Publication date
JPH0238924Y2 (en:Method) 1990-10-19

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