JPS61202464U - - Google Patents

Info

Publication number
JPS61202464U
JPS61202464U JP8709585U JP8709585U JPS61202464U JP S61202464 U JPS61202464 U JP S61202464U JP 8709585 U JP8709585 U JP 8709585U JP 8709585 U JP8709585 U JP 8709585U JP S61202464 U JPS61202464 U JP S61202464U
Authority
JP
Japan
Prior art keywords
header
pipe
double
nozzle
shows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8709585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8709585U priority Critical patent/JPS61202464U/ja
Publication of JPS61202464U publication Critical patent/JPS61202464U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP8709585U 1985-06-10 1985-06-10 Pending JPS61202464U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8709585U JPS61202464U (US07709020-20100504-C00041.png) 1985-06-10 1985-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8709585U JPS61202464U (US07709020-20100504-C00041.png) 1985-06-10 1985-06-10

Publications (1)

Publication Number Publication Date
JPS61202464U true JPS61202464U (US07709020-20100504-C00041.png) 1986-12-19

Family

ID=30638999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8709585U Pending JPS61202464U (US07709020-20100504-C00041.png) 1985-06-10 1985-06-10

Country Status (1)

Country Link
JP (1) JPS61202464U (US07709020-20100504-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013004623A (ja) * 2011-06-14 2013-01-07 Tokyo Electron Ltd 液処理装置および液処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013004623A (ja) * 2011-06-14 2013-01-07 Tokyo Electron Ltd 液処理装置および液処理方法

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