JPS61198270U - - Google Patents

Info

Publication number
JPS61198270U
JPS61198270U JP7739385U JP7739385U JPS61198270U JP S61198270 U JPS61198270 U JP S61198270U JP 7739385 U JP7739385 U JP 7739385U JP 7739385 U JP7739385 U JP 7739385U JP S61198270 U JPS61198270 U JP S61198270U
Authority
JP
Japan
Prior art keywords
plasma etching
chamber
plasma
circular
electromagnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7739385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7739385U priority Critical patent/JPS61198270U/ja
Publication of JPS61198270U publication Critical patent/JPS61198270U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP7739385U 1985-05-23 1985-05-23 Pending JPS61198270U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7739385U JPS61198270U (US06623731-20030923-C00012.png) 1985-05-23 1985-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7739385U JPS61198270U (US06623731-20030923-C00012.png) 1985-05-23 1985-05-23

Publications (1)

Publication Number Publication Date
JPS61198270U true JPS61198270U (US06623731-20030923-C00012.png) 1986-12-11

Family

ID=30620423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7739385U Pending JPS61198270U (US06623731-20030923-C00012.png) 1985-05-23 1985-05-23

Country Status (1)

Country Link
JP (1) JPS61198270U (US06623731-20030923-C00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277778A (ja) * 1987-05-08 1988-11-15 Anelva Corp 放電化学反応装置の回転磁界発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63277778A (ja) * 1987-05-08 1988-11-15 Anelva Corp 放電化学反応装置の回転磁界発生装置

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