JPS61196529U - - Google Patents

Info

Publication number

JPS61196529U

JPS61196529U JP7586185U JP7586185U JPS61196529U JP S61196529 U JPS61196529 U JP S61196529U JP 7586185 U JP7586185 U JP 7586185U JP 7586185 U JP7586185 U JP 7586185U JP S61196529 U JPS61196529 U JP S61196529U

Authority

JP

Japan

Prior art keywords

vacuum

chamber

preparatory chamber

preparatory

drying chamber

Prior art date

1985-05-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001035 drying Methods 0.000 claims description 3
• 238000001816 cooling Methods 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1

Cited By (2)