JPS61195962U - - Google Patents

Info

Publication number

JPS61195962U

JPS61195962U JP7946485U JP7946485U JPS61195962U JP S61195962 U JPS61195962 U JP S61195962U JP 7946485 U JP7946485 U JP 7946485U JP 7946485 U JP7946485 U JP 7946485U JP S61195962 U JPS61195962 U JP S61195962U

Authority

JP

Japan

Prior art keywords

fired

head

polishing

recording medium

silicon nitride

Prior art date

1985-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• 238000005498 polishing Methods 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1