JPS61195043U - - Google Patents

Info

Publication number
JPS61195043U
JPS61195043U JP7810885U JP7810885U JPS61195043U JP S61195043 U JPS61195043 U JP S61195043U JP 7810885 U JP7810885 U JP 7810885U JP 7810885 U JP7810885 U JP 7810885U JP S61195043 U JPS61195043 U JP S61195043U
Authority
JP
Japan
Prior art keywords
line
valves
growth furnace
vent line
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7810885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526736Y2 (US20030220297A1-20031127-C00074.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7810885U priority Critical patent/JPH0526736Y2/ja
Publication of JPS61195043U publication Critical patent/JPS61195043U/ja
Application granted granted Critical
Publication of JPH0526736Y2 publication Critical patent/JPH0526736Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7810885U 1985-05-24 1985-05-24 Expired - Lifetime JPH0526736Y2 (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7810885U JPH0526736Y2 (US20030220297A1-20031127-C00074.png) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7810885U JPH0526736Y2 (US20030220297A1-20031127-C00074.png) 1985-05-24 1985-05-24

Publications (2)

Publication Number Publication Date
JPS61195043U true JPS61195043U (US20030220297A1-20031127-C00074.png) 1986-12-04
JPH0526736Y2 JPH0526736Y2 (US20030220297A1-20031127-C00074.png) 1993-07-07

Family

ID=30621789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7810885U Expired - Lifetime JPH0526736Y2 (US20030220297A1-20031127-C00074.png) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPH0526736Y2 (US20030220297A1-20031127-C00074.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203208A (ja) * 2005-01-19 2006-08-03 Samsung Electronics Co Ltd 4方弁を有する半導体素子の製造装置、半導体素子の製造装置の弁制御方法及びそれを用いた半導体素子の製造方法
US11559599B2 (en) 2017-09-15 2023-01-24 Sony Corporation Scent retaining structure, method of manufacturing the scent retaining structure, and scent providing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203208A (ja) * 2005-01-19 2006-08-03 Samsung Electronics Co Ltd 4方弁を有する半導体素子の製造装置、半導体素子の製造装置の弁制御方法及びそれを用いた半導体素子の製造方法
US11559599B2 (en) 2017-09-15 2023-01-24 Sony Corporation Scent retaining structure, method of manufacturing the scent retaining structure, and scent providing device

Also Published As

Publication number Publication date
JPH0526736Y2 (US20030220297A1-20031127-C00074.png) 1993-07-07

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