JPS61193068U - - Google Patents

Info

Publication number

JPS61193068U

JPS61193068U JP1985075122U JP7512285U JPS61193068U JP S61193068 U JPS61193068 U JP S61193068U JP 1985075122 U JP1985075122 U JP 1985075122U JP 7512285 U JP7512285 U JP 7512285U JP S61193068 U JPS61193068 U JP S61193068U

Authority

JP

Japan

Prior art keywords

container

substrate

heating element

state

concave part

Prior art date

1985-05-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 238000010438 heat treatment Methods 0.000 claims description 4
• 238000010792 warming Methods 0.000 claims 1

Cited By (3)