JPS6119183U - 回り止め機構付き弁装置 - Google Patents

回り止め機構付き弁装置

Info

Publication number
JPS6119183U
JPS6119183U JP10345084U JP10345084U JPS6119183U JP S6119183 U JPS6119183 U JP S6119183U JP 10345084 U JP10345084 U JP 10345084U JP 10345084 U JP10345084 U JP 10345084U JP S6119183 U JPS6119183 U JP S6119183U
Authority
JP
Japan
Prior art keywords
piston
valve device
prevention member
rotation prevention
rotation mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10345084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245568Y2 (forum.php
Inventor
知樹 只腰
正好 鵜飼
Original Assignee
シ−ケ−デイ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シ−ケ−デイ株式会社 filed Critical シ−ケ−デイ株式会社
Priority to JP10345084U priority Critical patent/JPS6119183U/ja
Publication of JPS6119183U publication Critical patent/JPS6119183U/ja
Application granted granted Critical
Publication of JPH0245568Y2 publication Critical patent/JPH0245568Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP10345084U 1984-07-09 1984-07-09 回り止め機構付き弁装置 Granted JPS6119183U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10345084U JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10345084U JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Publications (2)

Publication Number Publication Date
JPS6119183U true JPS6119183U (ja) 1986-02-04
JPH0245568Y2 JPH0245568Y2 (forum.php) 1990-12-03

Family

ID=30662844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10345084U Granted JPS6119183U (ja) 1984-07-09 1984-07-09 回り止め機構付き弁装置

Country Status (1)

Country Link
JP (1) JPS6119183U (forum.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387485A (ja) * 1986-10-01 1988-04-18 株式会社東芝 群管理エレベ−タの制御装置
JP2005282712A (ja) * 2004-03-30 2005-10-13 Dainippon Screen Mfg Co Ltd 単動空気シリンダ弁およびそれを備えた基板処理装置
JP2008121859A (ja) * 2006-11-15 2008-05-29 Ckd Corp 真空弁

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387485A (ja) * 1986-10-01 1988-04-18 株式会社東芝 群管理エレベ−タの制御装置
JP2005282712A (ja) * 2004-03-30 2005-10-13 Dainippon Screen Mfg Co Ltd 単動空気シリンダ弁およびそれを備えた基板処理装置
JP2008121859A (ja) * 2006-11-15 2008-05-29 Ckd Corp 真空弁

Also Published As

Publication number Publication date
JPH0245568Y2 (forum.php) 1990-12-03

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