JPS61187984U - - Google Patents
Info
- Publication number
- JPS61187984U JPS61187984U JP7289485U JP7289485U JPS61187984U JP S61187984 U JPS61187984 U JP S61187984U JP 7289485 U JP7289485 U JP 7289485U JP 7289485 U JP7289485 U JP 7289485U JP S61187984 U JPS61187984 U JP S61187984U
- Authority
- JP
- Japan
- Prior art keywords
- wear plate
- elastic seal
- seal member
- gear type
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Rotary Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7289485U JPS61187984U (en:Method) | 1985-05-15 | 1985-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7289485U JPS61187984U (en:Method) | 1985-05-15 | 1985-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61187984U true JPS61187984U (en:Method) | 1986-11-22 |
Family
ID=30611741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7289485U Pending JPS61187984U (en:Method) | 1985-05-15 | 1985-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187984U (en:Method) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0180687U (en:Method) * | 1987-11-20 | 1989-05-30 | ||
| JPH0239585U (en:Method) * | 1988-09-08 | 1990-03-16 | ||
| JP2013007333A (ja) * | 2011-06-24 | 2013-01-10 | Toyota Industries Corp | 流体機械 |
| US8953144B2 (en) | 2003-08-29 | 2015-02-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9465301B2 (en) | 2003-12-23 | 2016-10-11 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
1985
- 1985-05-15 JP JP7289485U patent/JPS61187984U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0180687U (en:Method) * | 1987-11-20 | 1989-05-30 | ||
| JPH0239585U (en:Method) * | 1988-09-08 | 1990-03-16 | ||
| US8953144B2 (en) | 2003-08-29 | 2015-02-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9025127B2 (en) | 2003-08-29 | 2015-05-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9581914B2 (en) | 2003-08-29 | 2017-02-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9465301B2 (en) | 2003-12-23 | 2016-10-11 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| JP2013007333A (ja) * | 2011-06-24 | 2013-01-10 | Toyota Industries Corp | 流体機械 |
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