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JPS61187918A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS61187918A
JPS61187918A JP60029954A JP2995485A JPS61187918A JP S61187918 A JPS61187918 A JP S61187918A JP 60029954 A JP60029954 A JP 60029954A JP 2995485 A JP2995485 A JP 2995485A JP S61187918 A JPS61187918 A JP S61187918A
Authority
JP
Japan
Prior art keywords
gas
bringing
membrane
dry etching
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60029954A
Inventor
Yasuo Hashino
Yoshiaki Kageura
Eigo Terada
Original Assignee
Asahi Chem Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chem Ind Co Ltd filed Critical Asahi Chem Ind Co Ltd
Priority to JP60029954A priority Critical patent/JPS61187918A/en
Publication of JPS61187918A publication Critical patent/JPS61187918A/en
Application status is Pending legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • Y02P70/60Greenhouse gas [GHG] capture, heat recovery or other energy efficient measures relating to production or assembly of electric or electronic components or products, e.g. motor control
    • Y02P70/605Greenhouse gas [GHG] capture, heat recovery or other energy efficient measures relating to production or assembly of electric or electronic components or products, e.g. motor control the product being a semiconductor or solid state device or parts thereof

Abstract

PURPOSE: To increase the yield and the quality of an etched product and to attain the decrease of the cost by bringing a gas for the dry etching into contact with a fluorocopolymer having a cation exchange group to dehumidify the gas.
CONSTITUTION: A membrane is formed by using a fluorocopolymer having a cation exchange group such as a sulfonic acid group, a carboxyl group and a phosphoric acid group. As the ion-exchange capacity, the quantity becoming 0.5W2.5meq/g H-type dry resin in the copolymer is preferable. The formed membrane is preferably heat-treated at 60W250°C. A dry etching gas is dehumidified up to ≤-70°C dew point by bringing the gas used for the etching into contact with one side of the membrane, bringing a dried purge gas such as a vaporized material of liquefied nitrogen with the other side or decompressing it.
COPYRIGHT: (C)1986,JPO&Japio
JP60029954A 1985-02-18 1985-02-18 Dry etching method Pending JPS61187918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60029954A JPS61187918A (en) 1985-02-18 1985-02-18 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60029954A JPS61187918A (en) 1985-02-18 1985-02-18 Dry etching method

Publications (1)

Publication Number Publication Date
JPS61187918A true JPS61187918A (en) 1986-08-21

Family

ID=12290376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60029954A Pending JPS61187918A (en) 1985-02-18 1985-02-18 Dry etching method

Country Status (1)

Country Link
JP (1) JPS61187918A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0326083A2 (en) * 1988-01-26 1989-08-02 Asahi Glass Company Ltd. Vapor permselective membrane
US4875908A (en) * 1988-01-27 1989-10-24 Hiroyasu Kikukawa Process for selectively separating gaseous mixtures containing water vapor
US4961759A (en) * 1989-08-17 1990-10-09 Separation Dynamics, Inc. Closed loop gas dehydration process and apparatus
US5082472A (en) * 1990-11-05 1992-01-21 Mallouk Robert S Composite membrane for facilitated transport processes
US5084073A (en) * 1990-10-11 1992-01-28 Union Carbide Industrial Gases Technology Corporation Membrane drying process and system
US5160511A (en) * 1987-09-10 1992-11-03 Hewlett-Packard Company Water-vapour permeable material
JPH0638244U (en) * 1992-10-20 1994-05-20 ヤマト科学株式会社 Low humidity vault
EP0754487A1 (en) * 1995-07-17 1997-01-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
US5620500A (en) * 1994-04-08 1997-04-15 Asahi Glass Company Ltd. Dehumidifying method
WO1998028062A1 (en) * 1996-12-23 1998-07-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process for recovering cf4 and c2f6 from a gas
US5855647A (en) * 1997-05-15 1999-01-05 American Air Liquide, Inc. Process for recovering SF6 from a gas
US5858066A (en) * 1995-09-22 1999-01-12 E. I. Du Pont De Nemours And Company Process for separating and recovering fluorocarbons and HCI from gaseous mixtures thereof
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
US5919285A (en) * 1995-07-17 1999-07-06 American Air Liquide, Inc. Process and system for separation and recovery of perfluorocompound gases
EP0971785A4 (en) * 1997-01-23 2000-05-03 Carbon Membranes Ltd Recovery of perfluorinated compounds and hydrofluorocarbon gases using molecular sieve membranes
JP2006192364A (en) * 2005-01-13 2006-07-27 Asahi Kasei Corp Vapor permeable membrane

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160511A (en) * 1987-09-10 1992-11-03 Hewlett-Packard Company Water-vapour permeable material
US4909810A (en) * 1988-01-26 1990-03-20 Asahi Glass Company Ltd. Vapor permselective membrane
EP0326083A2 (en) * 1988-01-26 1989-08-02 Asahi Glass Company Ltd. Vapor permselective membrane
US4875908A (en) * 1988-01-27 1989-10-24 Hiroyasu Kikukawa Process for selectively separating gaseous mixtures containing water vapor
US4961759A (en) * 1989-08-17 1990-10-09 Separation Dynamics, Inc. Closed loop gas dehydration process and apparatus
US5084073A (en) * 1990-10-11 1992-01-28 Union Carbide Industrial Gases Technology Corporation Membrane drying process and system
US5082472A (en) * 1990-11-05 1992-01-21 Mallouk Robert S Composite membrane for facilitated transport processes
JPH0638244U (en) * 1992-10-20 1994-05-20 ヤマト科学株式会社 Low humidity vault
US5620500A (en) * 1994-04-08 1997-04-15 Asahi Glass Company Ltd. Dehumidifying method
EP1287875A3 (en) * 1995-07-17 2003-03-12 L'Air Liquide Société Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procédé Georges Claud System for separation and recovery of perfluorocompound gases
US6312502B1 (en) * 1995-07-17 2001-11-06 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
EP0754487A1 (en) * 1995-07-17 1997-01-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
US6254666B1 (en) 1995-07-17 2001-07-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
US5919285A (en) * 1995-07-17 1999-07-06 American Air Liquide, Inc. Process and system for separation and recovery of perfluorocompound gases
US6214089B1 (en) * 1995-07-17 2001-04-10 American Air Liquide, Inc. Process and system for separation and recovery of perfluorocompound gases
US6605133B1 (en) 1995-07-17 2003-08-12 L'air Liquide - Societe Anonyme A' Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and system for separation and recovery of perfluorocompound gases
US6444011B2 (en) 1995-07-17 2002-09-03 American Air Liqide, Inc. Process and system for separation and recovery of perfluorocompound gases
US5858066A (en) * 1995-09-22 1999-01-12 E. I. Du Pont De Nemours And Company Process for separating and recovering fluorocarbons and HCI from gaseous mixtures thereof
WO1998028062A1 (en) * 1996-12-23 1998-07-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process for recovering cf4 and c2f6 from a gas
EP0971785A4 (en) * 1997-01-23 2000-05-03 Carbon Membranes Ltd Recovery of perfluorinated compounds and hydrofluorocarbon gases using molecular sieve membranes
US5855647A (en) * 1997-05-15 1999-01-05 American Air Liquide, Inc. Process for recovering SF6 from a gas
US6096114A (en) * 1997-05-15 2000-08-01 American Air Liquide, Inc. Process for recovering SF6 from a gas
JP2006192364A (en) * 2005-01-13 2006-07-27 Asahi Kasei Corp Vapor permeable membrane

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