JPS61187373U - - Google Patents

Info

Publication number
JPS61187373U
JPS61187373U JP7174085U JP7174085U JPS61187373U JP S61187373 U JPS61187373 U JP S61187373U JP 7174085 U JP7174085 U JP 7174085U JP 7174085 U JP7174085 U JP 7174085U JP S61187373 U JPS61187373 U JP S61187373U
Authority
JP
Japan
Prior art keywords
filament
crucible
vapor deposition
vapor
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7174085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7174085U priority Critical patent/JPS61187373U/ja
Publication of JPS61187373U publication Critical patent/JPS61187373U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7174085U 1985-05-15 1985-05-15 Pending JPS61187373U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7174085U JPS61187373U (US07655688-20100202-C00086.png) 1985-05-15 1985-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7174085U JPS61187373U (US07655688-20100202-C00086.png) 1985-05-15 1985-05-15

Publications (1)

Publication Number Publication Date
JPS61187373U true JPS61187373U (US07655688-20100202-C00086.png) 1986-11-21

Family

ID=30609501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7174085U Pending JPS61187373U (US07655688-20100202-C00086.png) 1985-05-15 1985-05-15

Country Status (1)

Country Link
JP (1) JPS61187373U (US07655688-20100202-C00086.png)

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